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Compact multilayer nanoservo stage

A servo platform, compact technology, applied in the direction of instrument parts, instruments, shells, etc., can solve the problems of poor support effect and large structural size of the terminal platform, and achieve the effect of good support effect and small size

Active Publication Date: 2018-06-22
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing two-dimensional nano-flexible motion platform has the defects of large structural size and poor support effect of the terminal platform

Method used

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  • Compact multilayer nanoservo stage
  • Compact multilayer nanoservo stage
  • Compact multilayer nanoservo stage

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0021] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0022] The compact multilayer nano-servo platform 10 according to an embodiment of the present invention will be described below with reference to the accompanying drawings. Such as Figure 1-Figure 5 As shown, the compact multi-layer nano-servo platform 10 according to the embodiment of the present invention includes a base 101, a terminal platform 102, an X-direction driver (not shown in the figure), a Y-direction driver (not shown in the figure), a first The Y-direction flexible decoupling piece 1041 , the first X-direction flexible guide piece 1051 , the first X-direction flexible decoupling piece 1042 and the first Y-direction flexible guide piece 1053 .

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PUM

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Abstract

The invention discloses a compact-type multilayer nano servo platform, and the platform comprises a substrate; a terminal platform; an X-direction driver and a Y-direction driver; a first Y-direction flexible decoupling device and a first X-direction flexible guide device, wherein the first Y-direction flexible decoupling device is connected with the X-direction driver, and the first X-direction flexible guide device is connected with the first X-direction driver; a first X-direction flexible decoupling device and a first Y-direction flexible guide device, wherein the first X-direction flexible decoupling device is connected with the terminal platform and the Y-direction driver, and the first Y-direction flexible guide device is connected with the Y-direction driver; At least one of the first X-direction flexible guide device and the first Y-direction flexible guide device is correspondingly located below at least one of the first Y-direction flexible decoupling device and the first X-direction flexible decoupling device in a vertically opposite manner. According to the embodiment of the invention, the platform is compact in structure, is high in movement precision, and is large in centimeter-level stroke.

Description

technical field [0001] The invention relates to a compact multilayer nano servo platform. Background technique [0002] The existing two-dimensional nano-flexible motion platform has the defects of large structural size and poor support effect of the terminal platform. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. Therefore, the present invention proposes a compact multi-layer nano-servo platform with the advantages of small size and good support effect of the terminal platform. [0004] The compact multilayer nano-servo platform according to an embodiment of the present invention includes: a base; a terminal platform, the terminal platform is located inside the edge of the base; an X-direction driver and a Y-direction driver; a first Y-direction flexible decoupling and the first X-direction flexible guide, the first Y-direction flexible decoupling member extends along...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B9/10
CPCG12B9/10
Inventor 张震汪昌明王鹏闫鹏
Owner TSINGHUA UNIV