Low temperature pump cold screen

A technology of cryogenic pump and cryogenic refrigerator, applied in the direction of pumps, pump components, variable capacity pump components, etc., can solve the problems of small condensation area, low capture efficiency, easy rebound of gas molecules, etc., to improve the pumping speed, The effect of increasing pumping speed

Inactive Publication Date: 2016-04-06
VACREE TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The cold screen of this structure mainly relies on its inner wall to condense and absorb the pumped gas. Since the inner wall of the cold screen is smooth, it has many shortcomings: first, the condensation area is small; second, the uncondensed Gas molecules bounce off easily, resulting in inefficient capture

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment one: if figure 1 , 2 As shown, the protrusions are arranged on the barrel wall of the cold screen body 10. The protrusions are in the shape of thin sheets or slats. The section of the protrusions along the axial direction of the cold screen body 10 is fan-shaped or ring-shaped. The center of the circle is located on the axis line of the cold screen body 10 . The sector mentioned here is a part of the ring. The fan-shaped or ring-shaped protrusions are convenient to arrange, and are evenly arranged on the barrel wall of the cold shield body 10, so that the condensation of the gas is more uniform. In addition, the fan-shaped or ring-shaped protrusions have the same protrusion height relative to the cold screen body 10 , and will not interfere with other components provided on the cold screen body 10 .

[0024] Specifically, the protrusions are annular plate-shaped first ribs 20 , and a plurality of first ribs 20 are evenly spaced along the axial direction of...

Embodiment 2

[0025] Example two such as image 3 , Figure 4 As shown, the protrusions are arranged on the barrel wall of the cold shield body 10 , the protrusions are in the shape of rectangular sheets or slats, and the length direction of the protrusions is parallel to the axial direction of the cold shield body 10 . The difference from Embodiment 1 is that the protrusions are rectangular instead of annular. Although the structures are different, they all have the same effect.

[0026] Specifically, the protrusion is a second rib 30 in the shape of a rectangular plate, and a plurality of second ribs 30 are evenly spaced along the circumferential direction; a third through hole 31 and a plurality of second ribs 30 are opened on the second rib 30 Four through holes 32, the axis direction of the third through hole 31 is parallel to the axis direction of the cold shield body 10, the axis direction of the fourth through hole 32 is arranged along the radial direction of the cold shield body 1...

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Abstract

The invention relates to the technical field of low temperature vacuum, in particular to a low temperature pump cold screen. The low temperature pump cold screen comprises a cylindrical cold screen body. The cylindrical bottom of the cold screen body is fixed to a cold head of a low temperature refrigerator. Protrusions are arranged at the portions, towards the inner side of a cylindrical cavity, of the cylindrical wall and / or the cylindrical bottom of the cold screen body. After the protrusions are arranged, the surficial area of the cold screen is greatly increased, the condensation contact area of a low temperature pump for pumped gas is increased, meanwhile, the collision path and frequency of the pumped gas and the condensation face are increased due to gaps between the protrusions, the capture probability of the pumped gas is increased, and therefore the pumping speed of the low temperature pump for the pumped gas is effectively increased.

Description

technical field [0001] The invention relates to the field of cryogenic vacuum technology, in particular to a cold shield of a cryogenic pump. Background technique [0002] A cryopump is a device that obtains and maintains a vacuum by the principles of low-temperature condensation and low-temperature adsorption. At present, the cryopump is mainly composed of a cryogenic refrigerator, a shell, a cold shield, an adsorption array (also called a cold umbrella), and a baffle (also called a baffle), among which the cold shield, the adsorption array, and the baffle are all directly or It is indirectly cooled by a low-temperature refrigerator in a low-temperature state, thereby realizing the condensation or adsorption of the pumped gas. The condensation and extraction of gas by the cryopump is mainly related to three factors: the performance of the refrigerator, the condensation area and the probability of capturing the gas by the condensation structure. To increase the pumping spe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/08F04B39/00
CPCF04B37/08F04B39/00
Inventor 武义锋方冬生丁怀况赵磊章学华刘得成南华李革陈福泰
Owner VACREE TECH
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