Protecting structure of mechanical arm
A technology for protecting structures and manipulators, applied in the field of manipulators, can solve the problems of rapid falling and low reliability of manipulators, and achieve the effect of preventing downward falling and simple structure
Inactive Publication Date: 2016-04-27
CHANGZHOU S C EXACT EQUIP
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Problems solved by technology
[0003] In order to solve the technical problem of low reliability of the existing manipulator for silicon wafer processing, the present invention provides a speed-up protection structure to prevent the manipulator from falling rapidly when the synchronous belt is broken, so that the manipulator can run more safely
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Embodiment Construction
[0008] Such as figure 1 Shown is a schematic structural diagram of a preferred embodiment of the present invention. The present invention proposes a protective structure for a manipulator, including a screw 1 and a reciprocating nut 2 matched with the screw. The outer side of this nut 2 is connected with the elevating arm 7 of manipulator, and screw mandrel 1 is vertically installed, and upper and lower ends are installed and fixed by a bearing respectively. And the lower end of screw mandrel 1 also passes through a belt transmission mechanism 3 and a lifting motor 4 . One side of the belt transmission mechanism 3 is provided with a sensor 5 for detecting whether the belt is disconnected, and the sensor 5 is electrically connected to the device control processor (not shown in the figure), and an electronic brake 6 is provided on the upper end of the screw mandrel 1. The brake 6 is electrically connected to the device control processor. In this embodiment, the belt transmiss...
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The invention discloses a protecting structure of a mechanical arm. The protecting structure comprises a vertical screw and a nut which is matched with the screw and connected with the lifting arm of the mechanical arm. The lower end of the screw is connected with a lifting motor through a belt transmission mechanism. A sensor is arranged on one side of the belt transmission mechanism and electrically connected with an equipment control processor. An electronic brake is arranged at the upper end of the screw and electrically connected with the equipment control processor. The protecting structure has the advantages that the sensor is mounted on one side of the belt transmission mechanism, data indicating whether a belt is broken or not can be transmitted to the processor, and the rotation of the screw can be released or braked by using the processor to control the electronic brake, and potential safety hazards caused by falling down of the mechanical arm can be prevented; the protecting structure is simple, safe and reliable.
Description
technical field [0001] The invention relates to trough cleaning equipment and wet processing equipment for solar silicon wafers, in particular to a manipulator in the processing equipment for solar silicon wafers. Background technique [0002] In the tank-type cleaning equipment and tank-type wet processing equipment for solar silicon wafers, the manipulator is required to lift the bearing parts loaded with silicon wafers, such as wafer boxes or flower baskets, into each container in turn for chemical corrosion or water cleaning. The lifting action of the manipulator is usually completed by the drive of the screw mechanism. One end of the screw rod is connected to the lifting motor through a synchronous belt transmission mechanism-the motor rotates, and the screw rod is driven to rotate through the synchronous belt transmission mechanism. The nut on the screw rod moves up and down, which makes the mechanical arm fixed with the nut move up and down. In the design of this ty...
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IPC IPC(8): B25J19/06
CPCB25J19/06
Inventor 左国军戴洪烨
Owner CHANGZHOU S C EXACT EQUIP