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Method, apparatus, and system for establishing a virtual tether

A user and semiconductor technology, applied in security devices, transmission systems, connection management, etc.

Active Publication Date: 2016-04-27
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, remotely controlling semiconductor processing tools poses some security risks that are not addressed by current technology

Method used

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  • Method, apparatus, and system for establishing a virtual tether
  • Method, apparatus, and system for establishing a virtual tether
  • Method, apparatus, and system for establishing a virtual tether

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Embodiment Construction

[0014] This disclosure is aimed at establishing figure 1 A method, apparatus and system for virtual tethering between a mobile device 3 and a semiconductor processing tool 1 shown in FIG. In a non-limiting embodiment, mobile device 3 may be, for example, a tablet, smartphone, laptop, any mobile computing device, or the like. The mobile device 3 is used to control the operation of the semiconductor processing tool 1 through wireless communication between the mobile device 3 and the semiconductor processing tool 1 . For example, the mobile device 3 is capable of turning the semiconductor processing tool 1 on or off, controlling the semiconductor processing tool 1 to perform various tasks and / or processes involved in fabricating semiconductor devices, and the like. The virtual tethering between the mobile device 3 and the semiconductor processing tool 1 advantageously enables greater safety for persons using or in close proximity to the semiconductor processing tool 1 and preven...

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Abstract

A method for establishing a virtual tether between a mobile device and a semiconductor processing tool, the method including: obtaining, by a mobile device, a unique key associated with the semiconductor processing tool; establishing a unique pairing between the mobile device and the semiconductor processing tool based on the unique key that is obtained by the mobile device; in response to successfully establishing the unique pairing, authenticating a user of the mobile device for access to the semiconductor processing tool; in response to successfully authenticating the user, performing resource arbitration on the semiconductor processing tool which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user; monitoring an activity level of the mobile device over a period of time; and comparing the activity level to a predetermined activity level threshold.

Description

technical field [0001] The present invention generally relates to the field of semiconductor processing, and more particularly to a method, device and system for establishing virtual tethering. Background technique [0002] During the manufacture of semiconductor devices, it is possible to control the semiconductor equipment, ie the process chambers called "tools" used to manufacture the semiconductor devices, from a mobile device over a wireless network. However, remotely controlling semiconductor processing tools poses some security risks that are not addressed by current technology. Contents of the invention [0003] According to one embodiment, a method for establishing a virtual tether between a mobile device and a semiconductor processing tool includes: obtaining, via the mobile device, a unique key associated with the semiconductor processing tool; establishing a unique pairing between the mobile device and the semiconductor processing tool; in response to successf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04W12/02H04W12/06H04W76/02H04L29/06H04W4/80
CPCH04W76/14H04L63/06H04L63/083H04L63/10H04W12/02H04W12/06H01L21/67288H04L63/0853H04L63/101H04W12/08H04W4/80H04W12/50H04W12/77H04W12/068H04L63/08
Inventor 克里斯·托尔格里姆松查德·威特曼保罗·巴林蒂内文森特·王黄忠河陈树华
Owner LAM RES CORP