a y 2 o 3 / al 2 o 3 Composite gradient hydrogen barrier coating and preparation method thereof
A composite coating and coating technology, applied in chemical instruments and methods, lamination, lamination devices, etc., can solve the problems affecting the reliability of the coating, affecting the density and hydrogen barrier properties of the coating material, etc., to achieve compactness High, improved hydrogen resistance and controllable thickness
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Embodiment 1
[0030] Y for the preparation of high-temperature vacuum heat collector tubes with a thickness of 0.5 μm 2 o 3 / Al 2 o 3 Composite gradient hydrogen barrier coating:
[0031] (1) Polish the inner surface of the stainless steel tube to a roughness of 1 μm;
[0032] (2) Using metal-organic chemical vapor deposition technology to prepare Al on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; specific process parameters are: reaction source temperature 150°C; reaction time 20min; carrier gas flow rate 200ml / min.
[0033] (3) Using metal-organic chemical vapor deposition technology to prepare Y on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; the specific process parameters are: reaction source temperature 100°C; reaction time 20min; carrier gas flow rate 100ml / min.
[0034] (4) Repeat the above step (2);
[0035] (5) Repeat the above step (3);
[0036] Finally, a multilayer Y with a thickness of about 0.5 ...
Embodiment 2
[0039] Y for the preparation of high temperature vacuum heat collecting tubes with a thickness of 1 μm 2 o 3 / Al 2 o 3 Composite gradient hydrogen barrier coating:
[0040] (1) Polish the inner surface of the stainless steel tube to a roughness of 0.5 μm;
[0041] (2) Using metal-organic chemical vapor deposition technology to prepare Al on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; specific process parameters are: reaction source temperature 180°C; reaction time 50min; carrier gas flow rate 200ml / min.
[0042] (3) Using metal-organic chemical vapor deposition technology to prepare Y on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; specific process parameters are: reaction source temperature 120°C; reaction time 50min; carrier gas flow rate 150ml / min.
[0043] (4) Repeat the above step (2);
[0044] (5) Repeat the above step (3).
[0045] Finally, a multilayer Y with a thickness of about 1 μm wa...
Embodiment 3
[0048] Y 2 o 3 / Al 2 o 3 Composite gradient hydrogen barrier coating:
[0049] (1) Polish the inner surface of the stainless steel tube to a roughness of 0.3 μm;
[0050] (2) Using metal-organic chemical vapor deposition technology to prepare Al on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; specific process parameters are: reaction source temperature 200°C; reaction time 30min; carrier gas flow rate 200ml / min.
[0051] (3) Using metal-organic chemical vapor deposition technology to prepare Y on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 Coating; specific process parameters are: reaction source temperature 160°C; reaction time 30min; carrier gas flow rate 80ml / min.
[0052] (4) Repeat the above step (2);
[0053] (5) Repeat the above step (3).
[0054] Finally, a multilayer Y with a thickness of about 0.8 μm was obtained 2 o 3 and Al 2 o 3 Composite gradient hydrogen barrier coating.
[0055] Dete...
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