Y2O3/Al2O3/Cr2O3 composite gradient hydrogen resistant coating and preparation method thereof
A composite coating, cr2o3 technology, applied in the direction of chemical instruments and methods, lamination, lamination equipment, etc., can solve the problem of poor hydrogen barrier performance, and achieve the effect of improved hydrogen barrier performance, controllable thickness, and uniform composition
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Embodiment 1
[0028] Y 2 o 3 / Al 2 o 3 / Cr 2 o 3 Composite gradient hydrogen barrier coating:
[0029] (1) Polish the inner surface of the stainless steel tube to a roughness of 1 μm;
[0030] (2) Using metal-organic chemical vapor deposition technology to prepare Cr on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 coating; specific process parameters are: reaction source temperature 120°C; carrier gas flow rate 100ml / min, Cr 2 o 3 Coating thickness is about 0.5μm;
[0031] (3) Using metal-organic chemical vapor deposition technology to deposit Cr on the inner surface of the high-temperature vacuum heat collector tube 2 o 3 On the coating, the preparation of Al 2 o 3 coating; specific process parameters are: reaction source temperature 150°C; carrier gas flow rate 200ml / min, Al 2 o 3 Coating thickness is about 2μm;
[0032] (4) Metal-organic chemical vapor deposition technology was used to deposit Al on the inner surface of high-temperature vacuum h...
Embodiment 2
[0036] Y 2 o 3 / Al 2 o 3 / Cr 2 o 3 Composite gradient hydrogen barrier coating:
[0037] (1) Polish the inner surface of the stainless steel tube to a roughness of 0.5 μm;
[0038] (2) Using metal-organic chemical vapor deposition technology to prepare Cr on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 coating; specific process parameters are: reaction source temperature 150°C; carrier gas flow rate 150ml / min, Cr 2 o 3 Coating thickness is about 1 μm;
[0039] (3) Using metal-organic chemical vapor deposition technology to deposit Cr on the inner surface of the high-temperature vacuum heat collector tube 2 o 3 On the coating, the preparation of Al 2 o 3 coating; specific process parameters are: reaction source temperature 180°C; carrier gas flow rate 200ml / min, Al 2 o 3 The thickness of the coating is about 4 μm;
[0040] (4) Metal-organic chemical vapor deposition technology was used to deposit Al on the inner surface of high-tempera...
Embodiment 3
[0044] Y 2 o 3 / Al 2 o 3 / Cr 2 o 3 Composite gradient hydrogen barrier coating:
[0045] (1) Polish the inner surface of the stainless steel tube to a roughness of 0.3 μm;
[0046] (2) Using metal-organic chemical vapor deposition technology to prepare Cr on the inner surface of high-temperature vacuum heat collector tubes 2 o 3 coating; specific process parameters are: reaction source temperature 150°C; carrier gas flow rate 150ml / min, Cr 2 o 3 Coating thickness is about 0.8μm;
[0047] (3) Using metal-organic chemical vapor deposition technology on the inner surface of high-temperature vacuum heat collector tube, Cr 2 o 3 On the coating, the preparation of Al 2 o 3 coating; specific process parameters are: reaction source temperature 200°C; carrier gas flow rate 200ml / min, Al 2 o 3 Coating thickness is about 6μm;
[0048] (4) Using metal-organic chemical vapor deposition technology on the inner surface of high-temperature vacuum heat collector tube, Al 2 o ...
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