Multifunctional suction cup device with backlight for mask plate detection

Abstract

The invention discloses a multifunctional suction cup device with a backlight for mask plate detection. The multifunctional suction cup device comprises a bottom plate and positioning side plates, wherein the positioning side plates are fixed at two ends of the bottom plate; a pair of suction cup bodies which can move close to each other or far away from each other to adsorb to-be-detected mask plates is arranged on the bottom plate between the positioning side plates at a distance; a backlight source is arranged on the bottom plate between the suction cup bodies; a gas channel is arranged in each suction cup body; the side surface of each suction cup body is connected with a plurality of gas connectors which are communicated with the corresponding gas channel; a long groove which is communicated with the corresponding gas channel is formed in the upper surface of each suction cup body at the position for shelving the corresponding mask plate; and fastening knobs for clamping and fixing the suction cup bodies from two ends of the suction cup bodies are arranged on the positioning side plates. Through the suction cup bodies for moving close to each other or far away from each other and the internally arranged backlight source, the multifunctional suction cup device meets the requirements of positioning for photolithography detection of the mask plates with different dimensions and specifications and the background light; the targets of vacuum adsorption of the mask plates with different specifications and background lighting are achieved; the operation time is shortened; and the detection efficiency and the detection quality are improved.

Description

technical field [0001] The invention relates to a multifunctional sucker device with a backlight for photolithographic detection of a mask plate. Background technique [0002] The suction cup device is used in semiconductor lithography inspection equipment to absorb and fix the mask or silicon wafer for preliminary positioning, so as to ensure that the mask can move with the workpiece table at the correct route and speed during the lithography inspection process, and accurately reach the set position. Commonly used suction cup devices can only absorb masks of one size and specification, and masks of different sizes and specifications need to be replaced with suction cup devices of different specifications before they can be used. In addition, the commonly used chuck devices do not have a backlight structure, which cannot realize real-time detection of some masks or silicon wafers, or greatly reduces the quality of detection. At present, the actual situation of the developm...

AI Technical Summary

Problems solved by technology

The relevant lithography inspection equipment is expensive. In the actual lithography inspection production process, the debugging process and adjustment process of the equipment are complicated and cumbersome. If a set of suction cup devices can only correspond to one size specification or required

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