Substrate heat treatment conveying cavity
A transmission cavity and substrate technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of single function of the carrying base, lack of ability to monitor temperature in real time, poor stability of substrate transmission, etc., and achieve improved transmission The effect of stability
Inactive Publication Date: 2016-11-09
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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Problems solved by technology
Because the levelness between a large number of rollers is difficult to ensure high accuracy, the transmission stability of the substrate during the production process is poor
[0003] In addition, the traditional heating method in the transfer chamber is based on the consideration of the overall temperature rise of the chamber, which is not convenient for precise control of local temperature
Because the function of the carrier base in the traditional high-temperature transfer chamber is very single, it does not have the ability to monitor the temperature of the transferred substrate in real time, and there is no way to debug the temperature
Method used
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[0027] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. ...
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The invention provides a substrate heat treatment conveying cavity used for heating and conveying a substrate positioned on a bearing base station. The cavity is internally provided with a three-layer structure of an upper layer, a middle layer and a lower layer, wherein the upper layer and the lower layer are heating layers respectively, and the middle layer is taken as a substrate conveying layer of the bearing base station; transmission devices for driving the conveying of the bearing base station are arranged on two sides of the cavity; the bearing base station is internally provided with a plurality of temperature detection devices for detecting the temperatures of areas in the bearing base station; the two heating layers positioned on the upper layer and the lower layer are connected with a temperature controller, the temperature controller is connected with the temperature detection devices, and the temperature controller is used for adjusting the output temperature of each area of the heating layers. According to the substrate heat treatment conveying cavity, the temperature detection devices are arranged in the bearing base station for conveying the substrate in the heat treatment conveying cavity, and the temperature conditions of the areas of the substrate on the bearing base station are monitored in real time, so that the heat treatment temperature of the substrate positioned inside the cavity is controlled accurately, and uniform heating for the substrate is realized.
Description
technical field [0001] The invention relates to the field of display panel manufacturing, in particular to a substrate heat treatment transfer chamber. Background technique [0002] Usually, in the manufacturing process of the display panel, in the traditional high-temperature transfer chamber, the transmission device mainly used to transfer the substrate generally has a roller with a Roller. Because the levelness between a large number of rollers is difficult to ensure high accuracy, the transmission stability of the substrate during the manufacturing process is poor. [0003] In addition, the traditional heating method in the transfer chamber is based on the consideration of the overall temperature of the chamber, which is not convenient for precise control of local temperature. Because the function of the carrier base in the traditional high-temperature transfer chamber is very single, it does not have the ability to monitor the temperature of the transferred substrate i...
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IPC IPC(8): H01L21/67
CPCH01L21/67196
Inventor 胡贻康
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD