A Method of Pattern Correction Using Non-equidistant Trigger for Scanning of Direct-Writing Lithography Machine

Abstract

The invention provides a method for correcting graphs by non-equidistance triggering in scanning of a direct-writing type photoetching machine, and belongs to the technical field of graph correction. The method for non-equidistance graph correction includes calibrating the length of a Trigger through a plurality of workbench position triggering signals, dividing the whole graph scanning stroke into a plurality of correction sections, and finally, correcting images in the correction sections by defined content of four registers in the corresponding correction sections according to dislocation directions of the images, wherein four registers are defined in each correction section, and the starting point, the ending point, the correction gap and the correction direction of each correction section is defined by the corresponding register. The method has the advantages of high graph correction capability, good correction effect and the like.

Description

technical field [0001] The invention relates to a method for correcting images of non-equidistant scans by a direct-write photolithography machine, and belongs to the technical field of image correction. Background technique [0002] Direct writing lithography equipment, also known as direct image transfer equipment, is an important equipment in the field of semiconductor and PCB production that is different from traditional semi-automatic exposure equipment. It uses a pattern generator to replace the mask plate of the traditional lithography machine, so that the graphic data of the computer can be directly exposed to the wafer or PCB board, saving the time of board making and the cost of making the mask plate, and it can be used as a mask plate itself. . At present, in the projection process based on scanning technology, how to ensure that the graphics flip is kept in sync with the workpiece table carrying the wafer or PCB substrate is a relatively difficult problem. [0...

AI Technical Summary

Problems solved by technology

The actual workpiece table will evaluate the Yaw, Pitch, and Roll values ​​during its movement. These three values ​​will cause the platform to deviate from the actual position during the movement. The most intuitive phenomenon brought about by image transfer is that each In each field and between fields, the graphics are spliced ​​from top to bottom, resulting in inconsistency and deformation.

The correction methods in the prior art all use the equidistant correction method, which not only has poor correction effect, but also cannot eliminate the inconsistency of splicing between the scanning fields of view caused by the movement error of the workpiece table

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