The present invention realizes a micromechanical rotation speed sensor
assembly, a rotation speed
sensor array and a corresponding manufacturing method. The micromechanical rotation speed sensor
assembly comprises: a first rotation speed sensor device (100) which can be driven by a drive device (AT1, AT2) via a drive frame device (RA1a, RA1b, RA2a, RA2b) to rotate and oscillate around a first axis (z), and is used to sense a first
external rotation speed around a second axis (y) and a second
external rotation speed around a third axis (x), wherein the first, second and third axes (z, y, x) are arranged perpendicular to each other; and a second rotation speed sensor device (200) which can be driven by the drive device (AT1, AT2) via the drive frame device (RA1a, RA1b, RA2a, RA2b) to linearly oscillate along the second axis (y), and is used to sense a third
external rotation speed around the first axis (z). The first rotation speed sensor device (100) is connected to the second rotation speed sensor device (200) via the drive frame device (RA1a, RA1b, RA2a, RA2b). The drive frame device (RA1a, RA1b, RA2a, RA2b) has a first drive frame (RA1a, RA1b) and a second drive frame (RA2a, RA2b), which can be driven by the drive device (AT1, AT2) to oscillate in anti-phase along the third axis (x). The rocker connects the first and second rotor devices and the first and second drive frames.