A meter-scale multi-optical axis parallel detection device and detection method
A parallel detection and multi-optical axis technology, which is applied in the direction of measuring devices, optical devices, and testing optical performance, can solve the problems of complex optical axis adjustment steps, affecting measurement accuracy, and poor detection flexibility, so as to achieve less error links and data The effect of high precision and strong applicability
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Embodiment 1
[0033] Such as figure 1As shown, when the normal line of the array mirror 1 under test is parallel to the optical axis 3 15 emitted by the autocollimator 3, the parallelism between the normal lines of the array mirror 1 is directly tested.
[0034] S11. Taking the fixed benchmark 3 as the reference benchmark of the autocollimator 1, and the autocollimator 1 completes the collimation based on this benchmark;
[0035] S12. Taking the center of the crosshairs of the autocollimator 1 as the reference, observe the attitude of the first wedge mirror before and after the movement through the autocollimator 1, and adjust the first wedge mirror before and after the movement through the control system and the first parallel micro-motion mechanism The posture of the mirror, that is, first adjust the autocollimator 2 through the first guide rail 71 and the second guide rail 72, so that it receives the optical axis 13 emitted by the autocollimator 1, and then adjust the first wedge through...
Embodiment 2
[0038] Such as figure 2 As shown, when the normal line of the array mirror 1 under test is not parallel to the optical axis 3 15 emitted by the autocollimator 3, that is, when the normal line of the array mirror 1 under test is 15 percent with the optical axis 3 15 of the autocollimator 3 When the included angle is 45°, it is necessary to add a light guide reflector at the bottom (or top) of the third calibration part 5, and the optical axis reflected back by the light guide reflector is consistent with the optical axis 315 emitted by the third calibration part 5, so that The optical path returns to complete the parallelism detection of two-dimensional multiple optical axes.
[0039] Specifically include the following steps:
[0040] S21: The attitude adjustment of the autocollimator 4 is completed. Based on the crosshair center of the autocollimator 4 itself, the attitude of the third wedge mirror before and after the movement is observed through it, and the movement is adj...
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