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A meter-scale multi-optical axis parallel detection device and detection method

A parallel detection and multi-optical axis technology, which is applied in the direction of measuring devices, optical devices, and testing optical performance, can solve the problems of complex optical axis adjustment steps, affecting measurement accuracy, and poor detection flexibility, so as to achieve less error links and data The effect of high precision and strong applicability

Inactive Publication Date: 2018-10-16
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main disadvantage is that the optical axis adjustment steps are complicated and there are many operators
The traditional large-aperture collimator can meet the requirements of multi-optical axis parallelism detection in a certain scale range. Detection, poor detection flexibility
The biggest disadvantage of the pentaprism method is that any change in the characteristic direction of the pentaprism during the test movement will cause the deviation of the optical axis, resulting in additional measurement errors and affecting the final measurement accuracy.

Method used

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  • A meter-scale multi-optical axis parallel detection device and detection method
  • A meter-scale multi-optical axis parallel detection device and detection method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Such as figure 1As shown, when the normal line of the array mirror 1 under test is parallel to the optical axis 3 15 emitted by the autocollimator 3, the parallelism between the normal lines of the array mirror 1 is directly tested.

[0034] S11. Taking the fixed benchmark 3 as the reference benchmark of the autocollimator 1, and the autocollimator 1 completes the collimation based on this benchmark;

[0035] S12. Taking the center of the crosshairs of the autocollimator 1 as the reference, observe the attitude of the first wedge mirror before and after the movement through the autocollimator 1, and adjust the first wedge mirror before and after the movement through the control system and the first parallel micro-motion mechanism The posture of the mirror, that is, first adjust the autocollimator 2 through the first guide rail 71 and the second guide rail 72, so that it receives the optical axis 13 emitted by the autocollimator 1, and then adjust the first wedge through...

Embodiment 2

[0038] Such as figure 2 As shown, when the normal line of the array mirror 1 under test is not parallel to the optical axis 3 15 emitted by the autocollimator 3, that is, when the normal line of the array mirror 1 under test is 15 percent with the optical axis 3 15 of the autocollimator 3 When the included angle is 45°, it is necessary to add a light guide reflector at the bottom (or top) of the third calibration part 5, and the optical axis reflected back by the light guide reflector is consistent with the optical axis 315 emitted by the third calibration part 5, so that The optical path returns to complete the parallelism detection of two-dimensional multiple optical axes.

[0039] Specifically include the following steps:

[0040] S21: The attitude adjustment of the autocollimator 4 is completed. Based on the crosshair center of the autocollimator 4 itself, the attitude of the third wedge mirror before and after the movement is observed through it, and the movement is adj...

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Abstract

The invention discloses a meter-scale multi-optical-axis parallel detection device and method. The detection device includes a first calibration section, a second calibration section, a third calibration section, a first translation mechanism, and a control system, wherein the first calibration section comprises a autocollimator 1, a stationary reference and a first support platform, the autocollimator 1 and the stationary reference are successively mounted on the first support platform, the second calibration section and the third calibration section are mounted on the first translation mechanism, the second calibration section and the third calibration section are connected with the control system. The device and method of the invention satisfy a multi-optical-axis parallelism detection requirement. The method for multi-optical-axis parallel detection may detect a range of a plurality of square meters and achieve detection automation.

Description

technical field [0001] The invention relates to the field of engineering optical detection, in particular to a meter-scale multi-optical axis parallel detection device and a detection method. Background technique [0002] In some meter-scale optical systems, there are multiple optical axis parallelism detection requirements, and appropriate detection equipment and detection methods are required. Commonly used detection methods include projection target plate method, large aperture collimator method and pentaprism method. The main advantage of the projection target method is that it is cheap, can be used in the field, and has high precision. The main disadvantage is that the optical axis adjustment steps are complicated and there are many operators. The traditional large-aperture collimator can meet the requirements of multi-optical axis parallelism detection in a certain scale range. Detection, detection flexibility is poor. The biggest disadvantage of the pentaprism met...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02G01B11/26
CPCG01B11/26G01M11/02
Inventor 曹庭分陈海平熊召袁晓东刘长春叶海仙易聪之罗欢全旭松魏春蓉周海王晓红郑万国
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS