Graphite boat for film coating

A technology of graphite boat and coating area, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of too thin, uneven temperature conduction, large volume of graphite boat, etc., and reduce the proportion of failed pieces , The effect of improving the uniformity of the coating film thickness and improving the average efficiency

Inactive Publication Date: 2016-12-14
ALTUSVIA ENERGY TAICANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, due to the large size of the above-mentioned graphite boat, the temperature conduction in the graphite boat is not uniform during the coating process, so that the silicon wafer at the edge boat often has a higher temperature and thi

Method used

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  • Graphite boat for film coating
  • Graphite boat for film coating

Examples

Experimental program
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Effect test

Example Embodiment

[0024] Preferred embodiment one:

[0025] The preferred embodiment provides a graphite boat for film coating. Such as figure 2 As shown, the graphite boat for coating includes a plurality of first graphite boats 1, a plurality of second graphite boats 2, and a radio frequency generator 3 for connecting with electrodes.

[0026] The first graphite boat 1 and the second graphite boat 2 are arranged in parallel and spaced apart. Each second graphite boat 2 is connected to one of the electrodes of the graphite boat, and each first graphite boat 1 is connected to the other electrode of the graphite boat. One electrode connection.

[0027] Such as figure 1 As shown, the first graphite boat 1 has a silicon wafer coating area 11 and a specific area 12. The specific area 12 is a specific resistivity area, which needs to be processed by a doping process, and the cross section is preferably processed into a rectangle; the length of the specific area 12 is equal to the width of the first gra...

Example Embodiment

[0031] Preferred embodiment two:

[0032] The preferred embodiment provides a graphite boat for film coating. The graphite boat for coating includes 10 first graphite boats and 11 second graphite boats. The resistivity of the second graphite boat is 9×10 -6 Ω.m, the resistivity of the specific area of ​​the first graphite boat (outer boat) outside the graphite boat is 10 -3 Ω.m, the resistivity of the specific area of ​​the first graphite boat (center boat) in the center of the graphite boat is 10 -5 Ω.m, along the center of the graphite boat toward the outside, the resistivity of the specific area of ​​each first graphite boat gradually increases to 10 -3 Ω.m.

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Abstract

The invention discloses a graphite boat for film coating and belongs to the technical field of solar battery film coating. The graphite boat is designed to solve the problem that the thickness of a film is not uniform during film coating of an existing graphite boat. The graphite boat for film coating comprises a plurality of first graphite boat pieces at intervals. Each first graphite boat piece is provided with a silicon wafer film coating area and a specific area, wherein the specific area deviates from the silicon wafer film coating area by a preset distance. Resistivities of the specific areas of the first graphite boat pieces are sequentially and gradually increased from the center of the graphite boat to the outer side. By means of the graphite boat for film coating, the film coating thickness is more uniform, the proportion of failure wafers can be reduced, and battery efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of solar cell coating, in particular to a graphite boat for coating. Background technique [0002] At present, the crystalline silicon solar cell industry still occupies 90% of the market share, indicating that this type of solar cell has strong vitality and competitiveness, and silicon wafers are the carrier of solar cells, and one of the processes in the production and processing of silicon wafers is plasma. Enhanced chemical vapor deposition (PECVD) coating, its function is to improve the solar energy conversion rate of silicon wafers. In this process, a graphite boat is required, which is the carrier of the silicon wafer coating. By placing the silicon wafer in the graphite boat and undergoing plasma chemical vapor deposition, a layer of dark blue SiN is deposited on the surface of the silicon wafer. x . [0003] Factors such as the structure and size of the graphite boat directly affect the conversion...

Claims

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Application Information

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IPC IPC(8): C23C16/458
CPCC23C16/4581
Inventor 陈文浩王冕奚彬刘仁中
Owner ALTUSVIA ENERGY TAICANG
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