A 60-pair Rod Improved Siemens Process Polysilicon Reduction Furnace Chassis

Abstract

The invention provides a 60-pair-rod improved Siemens process polycrystalline silicon reducing furnace base plate, which relates to a polycrystalline silicon reducing furnace base plate, and solves the problems of low quality, high energy consumption, low yield and low primary conversion rate of polycrystalline produced by the existing improved Siemens process polycrystalline silicon reducing furnace. 8 electrodes, 16 electrodes, 24 electrodes, 32 electrodes and 40 electrodes are sequentially distributed at an electrode first-ring annular center line, an electrode second-ring annular center line, an electrode third-ring annular center line, an electrode fourth-ring annular center line and an electrode fifth-ring annular center line; a center mixed air inlet spray nozzle is formed in the center position of the base plate; 8 first mixed air inlet spray nozzles, 12 second mixed air inlet spray nozzles, 16 third mixed air inlet spray nozzles and 4 mixed air outlets are sequentially formed in a mixed air inlet spray nozzle first-ring annular center line, a mixed air inlet spray nozzle second-ring annular center line, a mixed air inlet spray nozzle third-ring annular center line and a base plate outlet ring annular center line.

Description

technical field [0001] The invention relates to a chassis of a polysilicon reduction furnace. Background technique [0002] As one of the best materials for photovoltaic converters, polysilicon has always been paid close attention to by people. Currently 95% of solar cells are based on silicon. The improved Siemens method is currently a relatively mature process for preparing polysilicon. Its principle is to use high-purity hydrogen and high-purity trichlorosilane to undergo a reduction reaction on the surface of the heated silicon core to generate polysilicon microcrystals, which are adsorbed and deposited on the silicon core. process. Compared with the traditional Siemens method, the improved Siemens method has many advantages such as energy saving, consumption reduction, and less environmental pollution. Among them, the reduction furnace is the key equipment in the improved Siemens process, and the structure and operation stability of the reduction furnace are importan...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a 60-pair improved Siemens method polysilicon reduction furnace chassis; to solve the problems of the existing improved Siemens method polysilicon reduction furnace such as limited output, low primary conversion rate of TCS, and low utilization rate of heat radiation.

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