Atmospheric Pressure Magnetic Enhancement and Magnetic Confinement DC Glow Discharge Ion Source

A technology of DC glow discharge and DC discharge, applied in ion source/gun, magnetic declination angle of separator tube, parts of particle separator tube, etc., can solve the problem of no signal output of analytical instruments, and achieve high ion transmission efficiency Effect

Active Publication Date: 2018-01-19
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

Although, after adding a pair of permanent magnets parallel to each other, the ionization efficiency of the atmospheric pressure magnetic field-enhanced low-temperature plasma brush generator in its discharge space has been improved, but if it is directly applied to chemical composition detection and environmental monitoring , due to the large volume of the plasma jet, only a very small part of the ions in the plasma jet can be collected to the inlet of the analytical instrument under the action of the airflow for qualitative or quantitative analysis of the components, resulting in no signal output from the analytical instrument

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  • Atmospheric Pressure Magnetic Enhancement and Magnetic Confinement DC Glow Discharge Ion Source
  • Atmospheric Pressure Magnetic Enhancement and Magnetic Confinement DC Glow Discharge Ion Source
  • Atmospheric Pressure Magnetic Enhancement and Magnetic Confinement DC Glow Discharge Ion Source

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Embodiment Construction

[0034]To obtain a stronger detection signal for the analytical instrument connected to the ionization source, those skilled in the art usually achieve this by adjusting the external DC voltage to increase the discharge current or adjusting the flow controller to increase the flow rate of the plasma maintenance gas. However, the increase of the discharge current will lead to the increase of Joule heat in the DC discharge space and the increase of the temperature of the plasma gas, which will cause the instability of the discharge and reduce the accuracy and precision of the material composition analysis. However, the increase of the plasma maintenance gas flow rate directly leads to the increase of the operating cost of the ion source.

[0035] The present invention utilizes the action principle of the magnetic field on the moving charged particles, the electrons are subjected to the Lorentz force in the magnetic field B1, and the path changes from a straight line when no magnet...

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Abstract

The invention provides an atmospheric pressure magnetic enhancement and magnetic confinement DC glow discharge ion source whose ionization efficiency, ion transport efficiency, and work stability are increased on a larger scale. The atmospheric pressure magnetic enhancement and magnetic confinement DC glow discharge ion source is provided at the periphery of a cavity in the axial direction, closer to an air outlet and in deviation from a direct current discharge electrode with a pair of rectangular permanent magnets which are separated by the cavity, arranged in parallel and opposite to each other. The magnetic field B1 covers a direct current discharge area; the direction of the magnetic field B1 is perpendicular to the current J across the direct current discharge area and the J X B1 is along the air flowing direction; along the axial direction of the cavity, two annular permanent magnets of the same specifications are coaxially and sequentially arranged so that the two annular permanent magnets could form a uniform-magnetic field B2 which covers the direct current discharge area and the plasma jet area of the air outlet downstream; the direction of the uniform-magnetic field B2 is consistent with the axial directions of the cavity and the annular permanent magnets.

Description

technical field [0001] The invention relates to an atmospheric pressure gas discharge ion source generating device. Background technique [0002] The ion source is a device that utilizes external discharge, light radiation, and sputtering to ionize neutral atoms or molecules and extract ion beams from them. It is a key component of chemical composition detectors, environmental monitors and other equipment. Atmospheric pressure gas discharge ion source has been widely concerned by researchers at home and abroad because it is not limited by the vacuum environment, does not use chemical solvents, has little environmental pollution, is easy to operate, and has strong applicability. Atmospheric pressure gas discharge ion source, the common discharge methods include corona discharge, DC glow discharge, dielectric barrier discharge, hollow cathode discharge, and microwave discharge. to N 2 , He, Ar and other gases are used as the plasma maintenance gas, and the plasma generated ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J49/10H01J49/20
CPCH01J49/10H01J49/20
Inventor 汤洁段忆翔赵卫王屹山李静张同意王静
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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