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Detection jig and method for correcting scanning sensors of dry etcher

A technology for detecting fixtures and dry etching, applied in the field of scanning sensors, can solve the problems of glass substrate damage and affecting operation time, and achieve the effect of avoiding normal operation, simplifying the correction process, and shortening the correction time.

Active Publication Date: 2017-05-10
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Solve the problems in the prior art that the glass substrate is used to correct the scanning sensor of the dry etching machine, which may easily cause damage to the glass substrate and affect the working time

Method used

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  • Detection jig and method for correcting scanning sensors of dry etcher
  • Detection jig and method for correcting scanning sensors of dry etcher
  • Detection jig and method for correcting scanning sensors of dry etcher

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Experimental program
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Embodiment 1

[0039] Please also refer to Figure 3 to Figure 7 , image 3 It is a schematic diagram of embodiment 1 of the detection jig for correcting the scanning sensor of the dry etching machine according to the present invention, Figure 4 It is a schematic diagram of the detection jig for correcting the detection jig of the scanning sensor of the dry etching machine in Embodiment 1 of the present invention entering the transmission cavity of the dry etching machine, Figure 5 yes Figure 4 Enlarged view of part A in, Figure 6 It is a perspective view of the transparent detection plate in Embodiment 1 of the detection fixture for correcting the scanning sensor of the dry etching machine according to the present invention, Figure 7 It is a schematic diagram of another arrangement of the transparent detection board on the running carrier in Embodiment 1 of the detection jig for correcting the scanning sensor of the dry etching machine according to the present invention.

[0040] T...

Embodiment 2

[0052] see Figure 8 , Figure 8 It is a perspective view of the transparent detection plate in Embodiment 2 of the detection jig for correcting the scanning sensor of the dry etching machine according to the present invention. In this embodiment, barbs 11 are provided on the side of the two side plates 10 of the detection fixture away from the transparent detection plate 8. The purpose of setting the barbs 11 is to make the slot 801 clamped on the running carrier of the detection fixture. Faster, to ensure the horizontal setting of the transparent detection board 8, the transparent detection board of this type of structure needs to be sleeved by the end of the branch arm of the running carrier, and the transparent detection board 8 can be hung upside down on the running carrier of the detection fixture .

Embodiment 3

[0054] see Figure 9 , Figure 9 It is a schematic diagram of Embodiment 3 of the detection jig for correcting the scanning sensor of the dry etching machine according to the present invention. In this embodiment, the length of the transparent detection plate 8 is shorter than the length of the glass substrate detected by the dry etching machine. When the scanning sensor of the dry etching machine detects the glass substrate, the glass substrate basically covers the entire running carrier 2, that is, 4 and The branch arms 201 are all under the glass substrate, but the transparent detection plate 8 is only about 1 / 50 of the area of ​​the glass substrate. The width W3 of the transparent detection plate 8 ranges from 100 mm to 300 mm, and the range of its length W4 is 300 mm to 500 mm. The thickness of the transparent detection plate 8 is 1mm, and the area of ​​the transparent detection plate is small, which is convenient for taking and correcting. The transparent detection pla...

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Abstract

The invention discloses a detection jig and a method for correcting scanning sensors of a dry etcher. The detection jig for correcting the scanning sensors of the dry etcher comprises a detection carrier getting in and out of a transfer chamber of the dry etcher and a transparent detection plate mounted on the detection carrier, the transparent detection plate is made of an acrylic plate, and the structural size and the mounting position of the transparent detection plate on the detection carrier are matched with scanning areas, located above the transfer chamber of the dry etcher, of the scanning sensors. The transparent detection plate replaces a traditional glass substrate, damage to the glass substrate is effectively avoided, and the correction time is shortened. With the adoption of the method for correcting the scanning sensors of the dry etcher, through comparison of a first signal value A, a second signal value B and a reference value C of the dry etcher, whether the scanning sensors are required to be corrected can be effectively judged, the correction process can be simplified, and the correction time can be shortened.

Description

technical field [0001] The invention relates to the technical field of rectifying a scanning sensor of a dry etching machine, in particular to a detection fixture and method for correcting a scanning sensor of a dry etching machine. Background technique [0002] At present, dry etching machines (Dry Etcher) are widely used in the process of manufacturing glass substrates, which are an important part of TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-Liquid Crystal Display) panels. [0003] First, the glass substrate passes through the transfer chamber and is transferred to the process chamber of the dry etching machine. The glass substrate is etched in the process chamber (Process Chamber) of the dry etching machine; the glass substrate is processed in the process chamber After the completion, it is sent back to the transmission cavity of the dry etching machine by the running carrier. Generally, a scanning sensor is installed on both sides of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/958
CPCG01N21/958
Inventor 冯文杰
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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