Coupling indirect type millimeter wave phase detector for silicon-based known frequency gap

Abstract

The invention relates to a coupling indirect type millimeter wave phase detector for a silicon-based known frequency gap. The coupling indirect type millimeter wave phase detector is composed of a coplanar waveguide, a gap coupling structure, a phase shifter, a Wilkinson power divider, a Wilkinson power combiner and indirect type thermoelectric power sensors, wherein the whole structure is manufactured on the basis of a high-resistance Si substrate; four gap coupling structures are arranged in total; the two gap coupling structures on the upper side are connected with two indirect type thermoelectric power sensors; the two gap coupling structures on the lower side can realize the phase measurement for the signal; one phase shifter is arranged between front and rear gaps; the Wilkinson power divider and the Wilkinson power combiner are composed of the coplanar waveguide, an asymmetrical coplanar wire and a resistor; the indirect type thermoelectric power sensors are mainly composed of the coplanar waveguide, two resistors and a thermo-electric pile; the thermo-electric pile is composed of two different semiconductor arms in cascading connection and can convert the heat generated by a terminal resistor into the thermoelectric potential. The structure is low in cost and the efficiency is greatly increased.

Description

Technical field [0001] The invention proposes a silicon-based slot-coupled indirect millimeter wave phase detector with a known frequency, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] With the continuous development of information technology, signal detection technology is also advancing with the pace of the times. As we all know, a signal has three basic elements: frequency, phase and power. The detection of these three elements is Signal detection technology is the most important thing. Over the years, people's measurement technology for low-frequency signals has been very mature, but with the increase of signal frequency, high-frequency signal measurement technology is also undergoing continuous development and improvement. A millimeter wave signal is a high-frequency signal located between a microwave signal and an optical signal. For a millimeter wave signal with a known frequency, the phase detection of the sig...

AI Technical Summary

Problems solved by technology

Some existing phase detectors are not only complex in structure and high in cost, but also mostly unable to perform on-line measurement, with low integration and low efficiency.

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