Silicon -based known frequency gap coupling T -type direct millimeter -wave phase detector

Abstract

The invention relates to a silicon-based slot-coupled T-junction direct type known-frequency millimeter wave phase detector, comprising a coplanar waveguide transmission wire, slot coupling structures, a phase shifter, a T-junction power divider, a T-junction power combiner, and direct type thermoelectric power sensors; the whole detector is manufactured based on a high-resistance Si substrate, with four slot coupling structures provided; the two slot coupling structures above are connected with two direct type thermoelectric power sensors, the two slot coupling structures below measure signal phase, and the phase shifter is arranged between front and rear slots; the T-junction power divider and the T-junction power combiner are composed of a coplanar waveguide transmission wire, a sector defect structure and an air bridge; the direct type thermoelectric power sensors are mainly composed of a coplanar waveguide transmission wire, two thermocouples and a blocking capacitor, each thermocouple is composed of a metal arm and a semiconductor arm cascade and is capable of self-heating and thermoelectric conversion, these structure have low cost, and the efficiency is improved greatly.

Description

technical field [0001] The invention provides a silicon-based known-frequency gap-coupled T-junction direct-type millimeter-wave phase detector, which belongs to the technical field of micro-electromechanical systems (MEMS). Background technique [0002] The 21st century is an era of continuous development of electronic science and information technology. In this era, various electronic devices are flooding around people, and these electronic devices are inseparable from the detection or processing of signals. It can be seen that signal detection is a very important technology today. The three elements that make up a signal are power, phase and frequency. Among them, the phase detection of the signal is an extremely important content. The phase detector has great application value in the fields of aerospace, military and communication. Therefore, the signal Phase detection technology is receiving increasing attention. Millimeter wave signal is a very high frequency electro...

AI Technical Summary

Problems solved by technology

Millimeter wave signal is a very high frequency electromagnetic wave in the overlapping area of ​​microwave and far infrared wave. Due to the limited frequency band resources, people are constantly developing high frequency resources, and the detection and processing of millimeter wave signal is exactly what people need Today's phase detectors are not only complex in structure, but most of them cannot reach high operating frequencies. Therefore, it is necessary to design a new type of millimeter-wave phase detector to adapt to this ever-evolving era

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