Slit-coupled t-junction indirect mmWave phase detector with known frequency based on silicon

Abstract

The invention relates to a silicon-based slot-coupled T-junction indirect type known-frequency millimeter wave phase detector, comprising a coplanar waveguide, slot coupling structures, a phase shifter, a T-junction power divider, a T-junction power combiner, and indirect type thermoelectric power sensors; the whole detector is manufactured based on a high-resistance Si substrate, with four slot coupling structures provided; the two slot coupling structures above are connected with two indirect type thermoelectric power sensors, and the two slot coupling structures below measure signal phase, and the phase shifter is arranged between front and rear slots; the T-shaped power divider and the T-shaped power combiner are composed of a coplanar waveguide, a sector defect structure and an air bridge; the indirect type thermoelectric power sensors are mainly composed of a coplanar waveguide, two terminal resistors and a thermopile, and the thermopile composed of two different semiconductors arms cascaded and is capable of converting heat from the terminal resistors into thermoelectric potential; the silicon-based slot-coupled T-junction indirect type known-frequency millimeter wave phase detector with the structure can well detect millimeter wave phase online.

Description

technical field [0001] The invention provides a silicon-based known-frequency gap-coupled T-junction indirect millimeter-wave phase detector, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] In today's era of continuous development of information science and technology, the detection technology of various signals is also constantly developing and improving. Millimeter wave signal is a high-frequency signal between microwave signal and optical signal. For the detection of millimeter wave signal The technology has a very wide range of potential applications in the military, aerospace, and communications fields. Among them, the phase is one of the three important parameters (power, frequency and phase) in the millimeter wave signal. The detection of the phase has been one of the subjects of continuous research, especially in the millimeter wave frequency band. Phase measurement has always been one of the problems th...

AI Technical Summary

Problems solved by technology

Among them, the phase is one of the three important parameters (power, frequency and phase) in the millimeter wave signal. The detection of the phase has been one of the subjects of continuous research, especially in the millimeter wave frequency band. Phase measurement has always been one of the problems that people have encountered. Although some existing phase detectors can perform high-frequency phase measurement, their structure is complex, the cost is high, and online measurement cannot be realized. Although phase detectors can achieve online measurement, they are generally in the low frequency range and cannot reach the millimeter wave frequency band. These problems restrict the development of phase detectors and require continuous improvement and resolution.

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