Coating device, coating head and coating method
A coating device and coating technology, applied in the coating device, coating head and coating field, can solve the problems of inability to coat film-forming liquid, etc., reduce the occurrence rate of defective products, improve operability, and prevent dust Effect
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[0094] Embodiments of a coating device, a coating head, and a coating method according to the present invention will be described below based on the drawings. 1 is a side view in which the frame is omitted to show the internal structure of the coating device according to the embodiment (1), figure 2 It is a front view in which the housing is omitted to show the internal structure of the coating device.
[0095] The coating apparatus 1 includes a support table 10 for supporting a substrate 2 , a coating unit 20 including a pair of coating heads 21 composed of an upper head 22 and a lower head 23 , and a moving unit 40 for moving the coating unit 20 . .
[0096] In addition, the coating device 1 is equipped with a liquid supply unit 50 for supplying a pair of coating heads 21 with a film-forming liquid 51 containing a resin component, a drying oven 60 for drying the film-forming liquid 51 coated on the substrate 2, The control part 70 and the operation part 80 which control t...
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