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Acceleration sensor

A technology of acceleration sensor and voltage regulator, which is applied in the field of MEMS, can solve the problems that MEMS accelerometers are incompatible and difficult to measure static acceleration, etc., and achieve the effect of simplifying wiring

Active Publication Date: 2017-05-31
深圳市森瑟科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most of the sensitive units of the acceleration sensor of the existing IEPE interface are piezoelectric ceramics or piezoelectric crystals, which can only be used to measure dynamic acceleration (for example, vibration acceleration), but it is difficult to measure static acceleration (for example, gravitational acceleration) )
However, the existing MEMS accelerometers for measuring static acceleration are not compatible with the IEPE interface

Method used

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Embodiment Construction

[0018] Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited to the details of structural and component arrangements set forth in the following description or illustrations below of this application. The invention is adaptable to other embodiments and of being practiced or being carried out in various ways. Also, it is understood that the phraseology and terminology employed herein are for the purpose of description and should not be regarded as limiting. The use of "comprising", "including" or "having" and variations thereof herein is intended to encompass the item listed thereafter and its equivalents and additional items. The terms "mounted", "connected" and "coupled" are used broadly and include both direct and indirect mounting, connection and coupling. Further, "connected" and "coupled" are not limited to physical or mechanical connections or couplings, and can include electrical connections or coupling...

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Abstract

An acceleration sensor comprises: an acceleration sensor core suitable for at least measuring static acceleration and which is a three-wire operation acceleration sensor core; a voltage stabilizing unit coupled to a power end and ground end of the acceleration sensor core and which provides stable voltage for the acceleration sensor core; a filter unit coupled to the power end, output end and ground end of the acceleration sensor core and which provides reduced high-frequency disturbance for the output of the acceleration sensor core; a conversion unit coupled to the power end and ground end of the acceleration sensor core and the filter unit and which is used for converting three-wire operation of the acceleration sensor core into two-wire operation. The acceleration sensor of the application can measure static acceleration and is compatible with IEPE (integrated electronic piezoelectric) interface, wiring is simplified, and the defect that an existing IEPE sensor has no static response can be made up.

Description

technical field [0001] The invention relates to the field of MEMS, in particular to an acceleration sensor. Background technique [0002] A standard interface of the acceleration sensor is a piezoelectric integrated circuit interface (integral electronic piezoelectric, IEPE). The acceleration sensor of the IEPE interface is powered by a constant current circuit, and at the same time outputs a voltage on the power supply circuit, which is widely used in the field of vibration and acceleration measurement. [0003] Most of the sensitive units of the acceleration sensor of the existing IEPE interface are piezoelectric ceramics or piezoelectric crystals, which can only be used to measure dynamic acceleration (for example, vibration acceleration), but it is difficult to measure static acceleration (for example, gravitational acceleration) ). However, the existing MEMS accelerometers for measuring static acceleration cannot be compatible with the IEPE interface. Contents of th...

Claims

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Application Information

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IPC IPC(8): G01P15/00G01P15/12G01P15/125G01P1/00
CPCG01P1/00G01P15/00G01P15/12G01P15/125
Inventor 钟茗
Owner 深圳市森瑟科技发展有限公司
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