Semiconductor processing device and method
A processing device and processing method technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of difficult detection, large processing fluid, difficult to be accurately controlled, etc., and achieve the effect of saving consumption
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[0052] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0053] The "one embodiment" or "an embodiment" referred to herein means that a specific feature, structure, or characteristic related to the embodiment can be included in at least one implementation of the present invention. The appearances of "in one embodiment" in different places in this specification do not necessarily all refer to the same embodiment, nor are they necessarily separate or alternative embodiments that are mutually exclusive with other embodiments. In the present invention, "multiple" and "several" mean two or more. In the present invention, "and / or" means "and" or "or".
[0054] The present invention provides a semiconductor processing device, which can accurately control the flow directio...
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