Two-dimensional single-stage diffraction grating for extreme ultraviolet

Abstract

The invention discloses a two-dimensional single-stage diffraction grating for extreme ultraviolet. The two-dimensional single-stage diffraction grating comprises a transparent substrate and a grid layer positioned on the surface of the transparent substrate, wherein the grid layer is provided with a plurality of transparent grids and a plurality of nontransparent grids; all of the transparent grids and the nontransparent grids are distributed alternately in a first direction and extend in a second direction, and the first direction is perpendicular to the second direction; in the first direction, two opposite edges of each transparent grid are zigzag; and the widths of the transparent grids in the first direction are identical everywhere. According to the technical scheme, diffraction is realized through the zigzag transparent grids and the nontransparent grids, the widths of the transparent grids are unchanged, and the transparent grids are distributed randomly, so that the widths of the nontransparent grids meet preset random distribution, and high-order harmonic waves are eliminated while the diffraction of preset wave bands is realized.

Description

technical field [0001] The invention relates to the technical field of optical devices, in particular to a two-dimensional single-stage diffraction grating for extreme ultraviolet. Background technique [0002] Diffraction gratings have been developed for a long time. At present, the gratings used in spectrometers are generally traditional metal thin film black and white optical gratings composed of a series of parallel grooves and lines, which have the problem of multi-level diffraction. Especially in the extreme ultraviolet band, due to the existence of a large number of atomic resonance lines and absorption lines in this band, any material has serious absorption of radiation in this band, even air is no exception, and its absorption length is usually on the order of microns or nanometers. Therefore, the study of extreme ultraviolet radiation is extremely difficult. [0003] At present, many diffraction grating devices have been invented and applied. Some diffraction grat...

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Problems solved by technology

Therefore, the study of extreme ultraviolet radiation is extremely difficult

[0003] At present, many diffraction grating devices have been invented and applied. Some diffraction grating devices can suppress the high-order diffraction produced by a specific wavelength λ when the grating manufacturing period D is in the (λ, 2λ) interval. However, the effectively suppressed wavelength λ range is only It is limited in the (D / 2, D) interval, and for short wavelengths such as extreme ultraviolet waves, it is difficult to control the period within the appropriate interval with the current nano-manufacturing process; some diffraction grating devices use different types of filters However, when measuring the spectrum, a filter is only effective for a certain wavelength region, and different regions require different inserts, which not only increases the manufacturing cost, but also makes the spectrometer structure becomes complicated, and more importantly, it will have a great impact on the accuracy of the measured spectral lines

In short, in the extreme ultraviolet band, these methods are difficult to obtain satisfactory results

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