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Transmission type self-focusing single-stage diffraction grating

A single-stage diffraction and self-focusing technology, applied in the field of diffraction gratings, can solve problems such as difficult processing, signal interference, multi-focus, etc., and achieve the effect of improving purity, improving spectral resolution, and realizing linear measurement

Active Publication Date: 2015-07-15
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, FZP has the problem of multi-focus, the sub-focus of the high-order harmonic will coincide with the main focus of the fundamental frequency light, which will cause signal interference
In order to solve this problem, people have found a theoretical solution - Gabor zone plate, whose transmittance has a strict cosine distribution and is not easy to process.

Method used

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  • Transmission type self-focusing single-stage diffraction grating
  • Transmission type self-focusing single-stage diffraction grating
  • Transmission type self-focusing single-stage diffraction grating

Examples

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Embodiment 1

[0028] This embodiment discloses a transmissive self-focusing single-stage diffraction grating suitable for the soft X-ray band, and provides the design method of the grating layout, the working mode of the grating, and the preparation method of the grating.

[0029] 1. Design method of raster layout

[0030] The overall structure of the grating is as figure 1 As shown, rectangular holes and long rectangular bars are randomly arranged on the transparent surface along the diffraction direction of the grating according to their respective distribution rules. The rectangular holes and long rectangular bars are opaque light-blocking materials, which are gold film, rectangular holes and long rectangular bars. The strips have the same width but different lengths; the length of the long rectangular strip is tens to hundreds of times the length of the rectangular hole; the white area in the figure is the light-transmitting part, and the black area is the rectangular hol...

Embodiment 2

[0050] Example 2 Fabrication of Replicated Gratings by X-ray Lithography

[0051] a: same as step c in the preparation method of Example 1;

[0052] b: use the mask produced in Example 1 as the original exposure image, and perform X-ray exposure on the film produced in step a of this example;

[0053] c: same as the preparation method step e in Example 1;

[0054] d: Removing the photoresist to obtain a transmissive self-focusing single-stage diffraction grating replica grating.

Embodiment 3

[0055] Example 3 Fabrication of the reflective grating

[0056] By means of transfer printing, adopt the same silicon wafer, gold film and photoresist material as in Example 1 or Example 2, add a layer of light-transmitting substrate under the gold film as a support, and make the same silicon wafer as in Example 1 or Example 2. 2. The reverse pattern structure can be used to make a reflective grating of a transmissive self-focusing single-stage diffraction grating, and the diffraction pattern of the reflective grating is the same as that of Embodiment 1 or Embodiment 2.

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Abstract

The invention provides a transmission type self-focusing single-stage diffraction grating which comprises two primitives: namely, rectangular holes and long rectangular strips, wherein the two primitives have the same width and different lengths; each long rectangular strip is tens to hundreds of times as long as each rectangular hole; in the diffraction direction perpendicular to the grating, the adjacent rectangular holes and the adjacent long rectangular strips are tightly stacked together; in the diffraction direction, the rectangular holes and the long rectangular strips are randomly arranged on the surface of a grating substrate according to respective distribution rules; in a stacked region of the rectangular holes and the long rectangular strips, the multiplicative relationship of two-dimensional transmission functions of the two is met. The transmission type self-focusing single-stage diffraction grating only comprises 0 and + / -1 stage diffractions so as to effectively eliminate the influence of higher harmonics on the spectrum, has a focal plane perpendicular to the grating plane, for focusing photons with different energies, integrates the light splitting, focusing, high-harmonic restraining and other characteristics, has the diffraction modes different from an ordinary grating, and is a composite optical element.

Description

technical field [0001] The invention relates to the field of diffraction gratings, in particular to a self-focusing single-stage diffraction grating composed of a series of rectangular holes and long rectangular light-blocking / transmitting elements randomly arranged according to their respective distribution rules. Background technique [0002] Ordinary gratings are commonly used spectroscopic components and are widely used in spectral measurements from visible light to soft X-ray bands. In the grating spectrometer, the ordinary grating is used as the core spectroscopic element of the spectrometer to obtain the spectrum; in the monochromator system, the ordinary grating is used as the core device of the monochromator to realize the monochromatization of the beam. However, ordinary gratings have some inherent disadvantages due to their simple structure. [0003] A single ordinary grating has no focusing effect, and the spectral resolution of the spectrum will be greatly limi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
CPCG02B5/1866G02B2005/1804
Inventor 曹磊峰范全平刘钰薇杨祖华魏来张强强陈勇钱凤晏卓阳
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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