Three-dimensional roughness measurement method of object surface based on zoom technology

A technology of object surface and measurement method, applied in measurement devices, instruments, optical devices, etc., can solve the problems of difficult to measure gradient surfaces with large gradients, limited lateral resolution of self-zoom microscopes, etc., to overcome the material and reflection of objects. The influence of rate, overcome locality and one-sidedness, and improve the effect of z-direction positioning accuracy

Active Publication Date: 2019-04-23
HUAINAN UNITED UNIVERSITY +1
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  • Application Information

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Problems solved by technology

However, it is difficult for them to measure the slope surface with a large gradient. White light interferometer and self-zooming microscope have limited lateral resolution. Scanning probe microscope is limited by the longitudinal measurement range and is generally only used for two-dimensional roughness measurement.

Method used

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  • Three-dimensional roughness measurement method of object surface based on zoom technology
  • Three-dimensional roughness measurement method of object surface based on zoom technology
  • Three-dimensional roughness measurement method of object surface based on zoom technology

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Embodiment Construction

[0034] In this embodiment, a three-dimensional roughness measurement system based on zoom technology, such as figure 1 As shown, it includes: "L" type z-direction support frame 1, stepper motor 2, ball screw 3, optical probe, a pair of screw nut seats 10, upper limit switch 11, lower limit switch 12, ball nut coupling block 14. Limit switch baffle 15, scale grating 16, grating reading head 17;

[0035]A stepper motor 2 is fixed on the upper left inside the longitudinal surface of the "L" type z-direction support frame 1. The function of the stepper motor is to drive the optical probe to move up and down. The speed and steering of the stepper motor are controlled by the motion control card. Software can be used to control the stepping motor to drive the optical probe to move up or down, how far to move, and how fast to move, and the stepping motor driver can be subdivided to improve the running accuracy of the motor, realize the micro-displacement of the optical probe, and impr...

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Abstract

The invention discloses a three-dimensional roughness measurement system based on zooming technology for an object surface and a method of the system. The measurement system comprises following hardware: an L-type z-directional support rack, a stepping motor, a ball screw, a pair of lead screw nut seats, an upper limiting switch, a lower limiting switch, a sliding linkage block, a limiting switch baffle plate, an optical probe formed by an optical lens and an image sensor, a scale raster and a raster reading head. In case that the optical probe and a to-be-measured object are in different z-directional distances, image sequences of out-of-focus, focusing and out-of-focus are acquired. Through software programming, a digital image related method and a focusing evaluation function are mainly used for processing the acquired image sequences, and a roughness calculation formula is used for obtaining a three-dimensional roughness evaluation parameter of the object surface. According to the invention, the three-dimensional surface roughness of complex geometric structures with various shapes, different materials and different surface reflectivity can be measured and the measurement precision can reach micro-nano level.

Description

technical field [0001] The invention relates to an optical zoom measurement method for surface three-dimensional roughness, which is especially suitable for the processing of key components. Background technique [0002] High-precision roughness measurement plays an important role in the improvement of the processing accuracy and performance of parts and the development of measuring instruments and even the development of my country's measurement and control industry. Therefore, it is of great significance to study high-precision roughness measurement methods. [0003] At present, the roughness measurement methods for complex geometric structures are mainly divided into two categories: contact measurement and non-contact measurement. Contact measurement methods include three-coordinate measuring machines and profilers, but the comprehensive accuracy of three-coordinate measuring machines for industrial applications can only reach the micron level, and the mechanical probe of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/30
CPCG01B11/30
Inventor 史艳琼卢荣胜尹秋霞李娟
Owner HUAINAN UNITED UNIVERSITY
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