Three-jaw-chuck type rapid disassembling and assembling structure for coating equipment
A three-jaw chuck and coating equipment technology, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc., can solve the problems of easily damaged internal electrical connections, increasing the number of equipment, and difficult disassembly and replacement. To achieve the effect of facilitating development and research, improving quick disassembly and assembly, and good product maintenance
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[0014] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0015] See Figure 1-2 , The present invention provides a technical solution: a three-jaw chuck type quick disassembly structure for coating equipment, including a ring gear 1, a screw 2, an upper shell 3, a secondary tooth 4, a jaw 5, and an electrical connector 6 And the lower shell 7; the lower shell 7 is provided with a sliding groove 71; the auxiliary tooth 4 is fixedly connected with the upper shell 3 by the screw 2; the pawl 5 is ...
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