Three-degree-of-freedom position measurement method for large-area magnetic suspension planar motor rotor

Abstract

The invention relates to a three-degree-of-freedom position measurement method for a large-area magnetic suspension planar motor rotor, which is characterized in that a measurement system adopted by the method comprises eight Z-direction electric eddy current sensors, two Y-direction electric eddy current sensors, an X-direction absolute grating and a Y-direction absolute grating, the eight Z-direction electric eddy current sensors are equally divided into four groups which are used for measuring the suspension heights of the rotor at four positions, measurement of each group of Z-direction eddy current sensors is enabled not to be interfered by heat dissipation holes by using an electric eddy current switching algorithm, and suspension height data of the rotor at the four positions is outputted; and corner displacement [theta]x around the X-axis, corner displacement [theta]y around the Y-axis and displacement z in the Z-direction of the planar motor rotor under a fixed coordinate system can be acquired through performing calculation by using the four groups of data. According to the invention, interference imposed on displacement measurement for the Z-direction electric eddy current sensors by heat dissipation holes at the magnetic steel surface can be overcome, and accurate three-degree-of-freedom measurement for the planar motor rotor in a fixed coordinate system of a stator is realized.

Description

Technical field [0001] The invention belongs to the technical field of semiconductor equipment and relates to a three-degree-of-freedom position measurement method for a large-area maglev planar motor mover. Background technique [0002] In industrial production, processes such as the production of electronic products, mechanical loading and unloading, and automatic instrument production all require the participation of planar drive devices. Currently, these devices are mostly driven by rotating motors and converted to planar motion. The planar motor uses electromagnetic energy to directly generate two-dimensional planar motion. It has many advantages such as high precision, high sensitivity, and simple structure. Therefore, it has attracted attention from all walks of life. At present, planar motors have achieved important applications in semiconductor processing and other fields. [0003] A large amount of heat is generated during the operation of a maglev planar motor. In order ...

AI Technical Summary

Problems solved by technology

However, the existence of cooling holes will interfere with the measurement of the Z-direction eddy current sensor, which directly affects the accurate calculation of the position of each degree of freedom of the planar motor mover, and then affects the high-precision control of the planar motor mover movement, hindering the high-speed motion of the planar motor mover. Realization of precision motion

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