A three-degree-of-freedom position measurement method for a large-area maglev planar motor mover
A plane motor and measurement method technology, which is applied to electromagnetic measuring devices, measuring devices, point coordinate measurement, etc. Problems such as accurate calculation
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[0040] The content of the specific structure and working principle of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0041] figure 1 and figure 2 It is a schematic diagram of the measurement system used in the present invention, the system includes a first Z-direction eddy current sensor 1, a second Z-direction eddy current sensor 2, a third Z-direction eddy current sensor 3, a fourth Z-direction eddy current sensor 4, a Five Z direction eddy current sensor 5, sixth Z direction eddy current sensor 6, seventh Z direction eddy current sensor 7, eighth Z direction eddy current sensor 8, first Y direction eddy current sensor 9, second Y direction eddy current sensor Sensor 10, X direction absolute grating 11 and Y direction absolute grating 12;
[0042] image 3 It is a schematic diagram of the fixed coordinate system and the minimum repeating unit. The present invention first establishes the fixed coordin...
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