Method and device for determining laser cleaning energy, laser cleaning method and system
A laser cleaning and energy technology, applied in the field of laser cleaning, can solve the problems of inability to guarantee the accuracy of the judgment results and low reliability, and achieve the effects of high reliability, wide application prospects and easy engineering.
Active Publication Date: 2019-05-31
苏州德威尔卡光电技术有限公司
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Since the composition of the cleaned sample surface is relatively diverse and complex, the identification method based on the above principles cannot guarantee the accuracy of the judgment results, so the reliability is not high
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[0058] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. After reading the present invention, those skilled in the art Modifications to various equivalent forms of the present invention fall within the scope defined by the appended claims of the present application.
[0059] The method and device for determining laser cleaning energy, the laser cleaning method and system described in this application will be described in detail below with reference to the accompanying drawings. Although the present application provides the method operation steps or device structure as shown in the following embodiments or drawings, more or less operation steps or module structures may be included in the method or device based on con...
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Abstract
The invention discloses a laser cleaning energy determining method, a laser cleaning energy determining device, a laser cleaning method and a laser cleaning system. The laser cleaning energy determining method comprises the following steps: cleaning according to initial cleaning energy and preset cleaning time, and selecting characteristic spectral lines of elements in a layer to be cleaned in the cleaning process; according to the intensity and the distortion information of the characteristic spectral lines, selecting the wavelengths of the characteristic spectral lines; on the basis of the initial cleaning energy, increasing predetermined energy for point cleaning, and acquiring the intensity ratio of the characteristic spectral lines of a matrix element and each element in the layer to be cleaned; judging whether at least two of a first ratio, a second ratio and a third ratio of the characteristic spectral lines of the matrix element and the elements in the layer to be cleaned are greater than or equal to a preset value; and if so, determining target laser cleaning energy based on current cleaning energy. Through the laser cleaning energy determining method, the laser cleaning energy determining device, the laser cleaning method and the laser cleaning system, provided by the invention, appropriate laser cleaning energy can be efficiently and automatically selected for reliable cleaning.
Description
technical field [0001] The invention relates to the field of laser cleaning, in particular to a method and device for determining laser cleaning energy, and a laser cleaning method and system. Background technique [0002] Laser cleaning technology is a green, efficient and easy-to-operate cleaning technology. As the country is increasingly advocating green manufacturing, this technology has received widespread attention. When performing laser cleaning, it is first necessary to determine the cleaning energy of the material to be cleaned. If the cleaning energy exceeds the ablation threshold of the substrate, the substrate will be damaged, and if the energy is too low, the surface attachments cannot be cleaned efficiently. Therefore, the accurate determination of laser cleaning energy is a key factor related to cleaning efficiency. The laser cleaning energy is generally represented by the power of the laser, and the unit is watts (W). [0003] At present, the acquisition o...
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IPC IPC(8): G01N21/31B08B7/00G01J1/10
CPCB08B7/0042G01J1/10G01N21/314
Inventor 王斌李明福袁冬青
Owner 苏州德威尔卡光电技术有限公司