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High-purity nitrogen trifluoride analysis oxygen-free adsorption gas chromatography valve path system and use method thereof

A technology of gas chromatography and nitrogen trifluoride, which is applied to the gas chromatography valve system of anaerobic adsorption for the analysis of high-purity nitrogen trifluoride and its application field, can solve problems affecting accuracy and system complexity, and improve accuracy degree, reduce system error, and avoid the effect of oxygen adsorption

Pending Publication Date: 2017-09-01
洛阳昊华气体科技有限公司
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Problems solved by technology

[0003] CN102636598A discloses a gas chromatography valve circuit system for the analysis of various high-purity fluorine-containing electronic gases and its use method. Five valves and four columns are adopted, and one injection can complete the 3 Determination of gas-phase impurities of various high-purity fluorine-containing electronic special gases, but its system is complex, and because the pre-separation column will absorb trace oxygen, it will inevitably affect the high-purity NF 3 Accuracy of Analysis and Determination of Medium and Trace Oxygen Components

Method used

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  • High-purity nitrogen trifluoride analysis oxygen-free adsorption gas chromatography valve path system and use method thereof

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Embodiment 1

[0041] as attached figure 1 The gas chromatographic valve circuit system shown is used for the separation and detection of trace impurities in nitrogen trifluoride.

[0042] The trace impurities of nitrogen trifluoride with a purity of more than 99.99% mainly include: oxygen (O 2 ), nitrogen (N 2 ), carbon monoxide (CO), carbon tetrafluoride (CF 4 ), carbon dioxide (CO 2 ), nitrous oxide (N 2 O) and sulfur hexafluoride (SF 6 ).

[0043] The first pre-separation chromatographic column 5 is a carbon molecular sieve (CST) chromatographic column with a length of 2 m.

[0044] The first analytical chromatographic column 6 is a 13X molecular sieve chromatographic column with a length of 3 m.

[0045] The second pre-separation chromatographic column 7 is a Hayesep D chromatographic column with a length of 5 m.

[0046] The second analytical chromatographic column 8 is a Hayesep DB chromatographic column with a length of 5 m.

[0047] 1. As attached figure 1 As shown, each val...

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Abstract

The invention discloses a high-purity nitrogen trifluoride analysis oxygen-free adsorption gas chromatography valve path system and a use method thereof. The valve path system using four valves and four posts comprises two four-way valves, two ten-way valves, two quantitative rings, four chromatographic columns, 11 pressure balance regulating valves and one discharging ionization detector. The system carrier gas is high-purity helium with the purity higher than 99.9999 percent. The system has the advantages that simplicity is realized; the operation is convenient; the analysis is accurate.

Description

technical field [0001] The invention relates to analysis equipment and analysis method of nitrogen trifluoride. Background technique [0002] Nitrogen trifluoride (NF 3 ) has been widely used in the fields of integrated circuits, photovoltaics and displays (TFT-LCD) because of its advantages of fast etching rate, high selectivity and no residual substances on the surface of etched materials. Since its purity has a great influence on the etching effect of the material, it is necessary to accurately analyze the NF 3 The main gas phase impurity O 2 , N 2 , CO, CO 2 , N 2 O and SF 6 content appears to be particularly important. [0003] CN102636598A discloses a gas chromatography valve circuit system for the analysis of various high-purity fluorine-containing electronic gases and its use method. Five valves and four columns are adopted, and one injection can complete the 3 Determination of gas-phase impurities of a variety of high-purity fluorine-containing electronic sp...

Claims

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Application Information

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IPC IPC(8): G01N30/20
CPCG01N30/20G01N2030/201
Inventor 焦培培杨亚琴张景利付梦月左风雪张亚平
Owner 洛阳昊华气体科技有限公司
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