Heterojunction thin film-based remote electrical fire hazard monitoring system and preparation method thereof
An electrical fire and monitoring system technology, applied to fire alarms, electrical components, circuits, etc. that rely on radiation, can solve the problem of increasing the complexity and manufacturing cost of the detector, reducing the scope of application of the detector, and being fragile and expensive. problems, to achieve stable performance, low dark current, and simple operation.
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Embodiment 1
[0028] A method for making a remote electrical fire monitoring system based on europium oxide / gallium oxide heterojunction thin film, using a mask plate and using radio frequency magnetron sputtering technology on the Eu oxide / gallium oxide heterojunction thin film chip 2 o 3 thin film and Ga 2 o 3 A layer of Ti / Au thin film is deposited on the thin film as the measuring electrode; and the europium oxide / gallium oxide heterojunction thin film chip with electrodes, network communication module and LED indicator light are connected to the peripheral circuit of ultraviolet photoelectric detection, and assembled into a remote electrical fire alarm Monitoring System.
[0029] Specifically, the preparation of the europium oxide / gallium oxide heterojunction thin film chip includes the following steps:
[0030] Step 1, put the n-type Si substrate into V(HF):V(H 2 o 2 )=1:5 solution to remove the natural oxide layer, then ultrasonically clean with acetone, ethanol and deionized wa...
Embodiment 2
[0036] A method for preparing a remote electrical fire monitoring system based on a heterojunction thin film, characterized in that the Eu 2 o 3 thin film and Ga 2 o 3 A layer of Ti / Au thin film is deposited on the thin film as the measuring electrode; and the europium oxide / gallium oxide heterojunction thin film chip with electrodes, network communication module and LED indicator light are connected to the peripheral circuit of ultraviolet photoelectric detection, and assembled into a remote electrical fire alarm Monitoring System.
[0037] Specifically, the preparation of the europium oxide / gallium oxide heterojunction thin film chip includes the following steps:
[0038] Step 1, put the n-type Si substrate into V(HF):V(H 2 o 2 )=1:5 solution to remove the natural oxide layer, then ultrasonically clean with acetone, ethanol and deionized water respectively, and vacuum dry;
[0039] Step 2, put Ga 2 o 3 and Eu 2 o 3 The target is placed on the No. 1 and No. 2 target...
Embodiment 3
[0042] A method for preparing a remote electrical fire monitoring system based on a heterojunction thin film, characterized in that the Eu 2 o 3 thin film and Ga 2 o 3 A layer of Ti / Au thin film is deposited on the thin film as the measuring electrode; and the europium oxide / gallium oxide heterojunction thin film chip with electrodes, network communication module and LED indicator light are connected to the peripheral circuit of ultraviolet photoelectric detection, and assembled into a remote electrical fire alarm Monitoring System.
[0043] Specifically, the preparation of the europium oxide / gallium oxide heterojunction thin film chip includes the following steps:
[0044] Step 1, put the n-type Si substrate into V(HF):V(H 2 o 2 )=1:5 solution to remove the natural oxide layer, then ultrasonically clean with acetone, ethanol and deionized water respectively, and vacuum dry;
[0045] Step 2, put Ga 2 o 3 and Eu 2 o 3 The target is placed on the No. 1 and No. 2 target...
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