The invention relates to an
ultraviolet / solar blind
ultraviolet two-color
detector, in particular to a monolithically-integrated multi-functional
ultraviolet / solar blind ultraviolet two-color
detector and a fabrication method thereof. A layer of
gallium oxide thin film is deposited on a
silicon carbide substrate by a
laser molecular beam epitaxial technology, and then a layer of
titanium / gold thin film is deposited on the
silicon carbide substrate and the
gallium oxide thin film by a
mask plate through a
radio frequency magnetron
sputtering technology to be used as an
electrode. The monolithically-integrated multi-functional two-color ultraviolet
detector fabricated according to the method has the advantages of reaction sensitivity, performance stability and low
dark current, the functions of ultraviolet
flame detection and ultraviolet intensity detection of a solar blind region can be separately achieved in different
voltage modes, and the monolithically-integrated multi-functional two-color ultraviolet detector can be used for detecting fire alarm, high-
voltage line
corona and solar ultraviolet intensity; and moreover, the fabrication method has the characteristics of high process
controllability, high universality, restorability of repeated tests and great application prospect, and is simple to operate.