Ultraviolet detector with high spectral selectivity and high sensitivity and preparation method of ultraviolet detector

An ultraviolet detector and high-sensitivity technology, applied in the field of ultraviolet detectors, can solve the problems of increasing the complexity and manufacturing cost of the detector, reducing the scope of application of the detector, and being fragile and expensive. stable effect
CN105679874AActive Publication Date: 2016-06-15东港智科产业园有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
东港智科产业园有限公司
Publication Date
2016-06-15

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Abstract

The invention relates to an ultraviolet detector, in particular to an ultraviolet detector with high spectral selectivity and high sensitivity and a preparation method of the ultraviolet detector. A beta-Ga<2>O<3> film is deposited on an n-type 4H-SiC substrate through a laser molecular beam epitaxy technique; and a Ti / Au film is deposited on the n-type 4H-SiC substrate and the beta-Ga<2>O<3> film for use as an electrode by a mask through a radio-frequency magnetron sputtering technique. The ultraviolet detector has the advantages that the prepared ultraviolet detector has stable performance, has high selectivity and high sensitivity on an ultraviolet spectrum with a specific wavelength, is low in dark current, and can be applied to fire alarm, high-voltage line corona and detection of the spectrum with the specific wavelength; furthermore, the preparation method has the characteristics of being high in process controllability, simple in operation, good in universality and the like and has a great application prospect; and a repeated test has recoverability.
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Description

technical field

[0001] The invention relates to an ultraviolet detector, in particular to an ultraviolet detector with high spectral selectivity and high sensitivity and a preparation method thereof. technical background

[0002] Because high-voltage line corona, space, missile plume and flames all contain ultraviolet radiation, ultraviolet detection technology is used in many fields such as military affairs, scientific research, aerospace, and communication electronics. At present, the wide-bandgap semiconductor ultraviolet detector is the main research direction of ultraviolet detectors, especially the sun-blind ultraviolet detector, which has the advantages of small size, low power consumption, no need for cryogenic cooling and low false alarm rate, and can be adjusted by The material composition changes the wavelength range of the response.

[0003] Spectral selectivity and sensitivity are important performance indicators of UV detectors. Detectors often respond to a s...

Claims

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