Device and method for residual value processing in sensor control
A sensor and control signal technology, applied in measurement devices, instruments, gyroscopes/steering sensing equipment, etc., can solve the problems of inaccurate control of sensors and limitations of sensor accuracy, achieve flexible and simple formation, improve reliability and accuracy performance, the effect of reducing the quantization error
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[0058] In the drawings, components or component groups corresponding to each other are denoted by the same reference numerals.
[0059] figure 1 A schematic diagram of an embodiment of the capacitive sensor 100 is shown. The capacitive sensor 100 has a proof mass 110, a force transmission unit and / or a sensor unit 120, a suspension structure 130 and a spring component 140.
[0060] The proof mass 110 is coupled to the suspension structure 130 through the spring component 140. The proof mass 110 may be an inductor, for example. The spring member 140 can be figure 1 The spring shown may also use spring components 140 of other structures, which can make the proof mass 110 move and / or vibrate relative to the suspension structure 130. For example, the spring member 140 may also be designed in the form of a thin beam or a metal wire.
[0061] The suspension structure 130 is fixedly connected to an unshown frame of the capacitive sensor 100. The suspension structure 130 may be, for ex...
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