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Sensor element for detecting at least one characteristic of measurement gas

A sensor element, gas technology, applied in the direction of measuring devices, using sound waves/ultrasonic waves/infrasonic waves to analyze fluids, instruments, etc., to achieve the effect of improving ion conductivity

Inactive Publication Date: 2017-12-08
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Although the sensor elements and methods for producing sensors known from the prior art have several advantages, they still have potential for improvement

Method used

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  • Sensor element for detecting at least one characteristic of measurement gas
  • Sensor element for detecting at least one characteristic of measurement gas
  • Sensor element for detecting at least one characteristic of measurement gas

Examples

Experimental program
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Embodiment Construction

[0078] FIG. 1 shows an example of a cross-section through a schematic sensor element 1 . The sensor element 1 is suitable for sensing at least one property of a measurement gas in the measurement gas space 4 . In this case, for example, the gas component content in the measurement gas or the temperature of the measurement gas can be sensed. The sensor element 1 has a substrate 2 or carrier 2 . The substrate 2 can be made of silicon, for example, and can be designed as a silicon wafer. A recess is provided in the substrate 2 , in which recess the membrane 20 is arranged. The membrane 20 has electrodes 10 a on the surface facing the measuring gas space 4 . Furthermore, the membrane 20 has a further electrode 10 b on the surface facing the reference gas space 5 . The electrodes 10a, 10b can be made of platinum or platinum compounds, for example. The electrodes 10a, 10b are considered not to belong to the diaphragm 20 in the context of the present application. The reference ...

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Abstract

The invention relates to a sensor element (1) for detecting at least one characteristic of a measurement gas in a measurement gas space (4) with at least one oxygen ion-conducting membrane (20). The at least one membrane (20) has, along a film thickness direction (22) at least in sections (S1.1, S1.2, S1.3) on at least a double layer (30). The double layer (30) is formed of a first layer (31) contains predominantly a first material (41) and a second layer (32), which for the most part a of the first material (41) different second material (42).

Description

technical field [0001] The invention relates to a sensor element for sensing at least one property of a measurement gas in a measurement gas space and to a method for producing such a sensor element. Background technique [0002] Various sensor elements and methods are known from the prior art for sensing at least one property of a measurement gas in a measurement gas space. In this case, basically any physical and / or chemical property of the gas is measured, wherein one or more properties can be sensed. The invention is explained below in particular with regard to the qualitative and / or quantitative sensing of the gas component content of a measurement gas, in particular with regard to the sensing of the oxygen content or nitrogen dioxide content in the measurement gas. The oxygen content can be sensed eg in partial pressure and / or in percentage. Alternatively or additionally, other properties of the measurement gas, such as temperature, can also be sensed. [0003] In p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/26G01N27/30
CPCG01N27/26G01N27/30G01N29/02G01N29/245G01N2291/0215G01N2291/0256G01N2291/02809
Inventor C·赫尔梅斯F·霍伊克
Owner ROBERT BOSCH GMBH