Sensor element for detecting at least one characteristic of measurement gas
A sensor element, gas technology, applied in the direction of measuring devices, using sound waves/ultrasonic waves/infrasonic waves to analyze fluids, instruments, etc., to achieve the effect of improving ion conductivity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0078] FIG. 1 shows an example of a cross-section through a schematic sensor element 1 . The sensor element 1 is suitable for sensing at least one property of a measurement gas in the measurement gas space 4 . In this case, for example, the gas component content in the measurement gas or the temperature of the measurement gas can be sensed. The sensor element 1 has a substrate 2 or carrier 2 . The substrate 2 can be made of silicon, for example, and can be designed as a silicon wafer. A recess is provided in the substrate 2 , in which recess the membrane 20 is arranged. The membrane 20 has electrodes 10 a on the surface facing the measuring gas space 4 . Furthermore, the membrane 20 has a further electrode 10 b on the surface facing the reference gas space 5 . The electrodes 10a, 10b can be made of platinum or platinum compounds, for example. The electrodes 10a, 10b are considered not to belong to the diaphragm 20 in the context of the present application. The reference ...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


