Temperature control system of miniature vacuum cavity

Abstract

A temperature control system of a miniature vacuum cavity comprises a vacuum container, a heating system and a refrigeration system which are in series connection together via a pipeline are configured outside the vacuum container, and the flow control valves are arranged on the series pipeline separately. The pipeline is communicated with a heat exchanger arranged inside the vacuum container, theother end of the heat exchanger is led out via the pipeline and is communicated with the heating device and the refrigeration device which are in series connection via a circulating pump, at least one temperature sensor connected with a temperature controller outside the vacuum container via a conducting wire is arranged inside the vacuum container, and the temperature controller is at least connected with the circulating pump and the flow control valves. The temperature control system has the characteristics of being reasonable in structure composition and small in size, being safe and reliable to use, being able to convert the temperature rapidly and accurately, etc.

Description

technical field [0001] The invention relates to a temperature control system for a small vacuum cavity, which belongs to the technical field of temperature control. Background technique [0002] The current temperature control system of the vacuum chamber mainly includes a vacuum heating device, such as a vacuum tube furnace equipment. This equipment generally adopts a natural cooling method when cooling down. Without a special cooling system, it is difficult to quickly reduce the temperature. In addition, this equipment The volume is large, the power consumption is usually large, not energy-saving and environmentally friendly, and it works under high AC voltage conditions, and the safety performance is not high; in addition, there is a type of resistance wire heating in the vacuum chamber to achieve temperature heating. There is also the shortcoming of only heating up but not rapid cooling. Although some more precise vacuum chambers are specially equipped with vacuum refri...

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Problems solved by technology

[0002] The current temperature control system of the vacuum chamber mainly includes a vacuum heating device, such as a vacuum tube furnace equipment. This equipment generally adopts a natural cooling method when cooling down. Without a special cooling system, it is difficult to quickly reduce the temperature. In addition, this equipment The volume is large, the power consumption is usually large, not energy-saving and environmentally friendly, and it works under high AC voltage conditions, and the safety performance is not high; in addition, there is a type of resistance wire heating in the vacuum chamber to achieve temperature heating. There is also the disadvantage of only heating up but not being able to cool down quickly

Although some more precise vacuum chambers are specially equipped with vacuum refrigeration systems, they usually use liquid nitrogen refrigeration below -60°C, and use external refrigeration equipment to reduce the temperature in the vacuum chamber above -60°C, which consumes a lot of energy.

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