Self-priming power test system and method of mems switch

A technology of power testing and switching, which is applied in the field of radio frequency, can solve the problems of shortage, unstandardized and practical test methods, etc., and achieve the effect of improving production efficiency and shortening design and development time

Active Publication Date: 2019-11-22
江苏智能微系统工业技术股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there is a lack of special research on the method of self-priming power testing of RFMEMS switches, and the existing testing methods have not reached standardization and practicality.

Method used

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  • Self-priming power test system and method of mems switch
  • Self-priming power test system and method of mems switch
  • Self-priming power test system and method of mems switch

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Embodiment Construction

[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0027] The self-pulling power test system and method of a MEMS switch according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0028] figure 1 It is a structural diagram of a self-priming power test system of a MEMS switch according to an embodiment of the present invention.

[0029] like figure 1 As shown, the MEMS switch self-priming power test system 100 according to an embodiment of the present invention, it should be noted that, the MEMS switches mentioned in the pr...

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PUM

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Abstract

The invention discloses a test system and method for self-absorption power of a MEMS switch, wherein the MEMS switch includes a coplanar waveguide and a movable polar plate and further includes a power applying module, which is used for inputting an adjustable radio frequency signal to the coplanar waveguide to drive the movable polar plate to move; a detecting module, which is used for detectingwhether or not the movable polar plate moves to judge whether or not a self-absorption phenomenon is produced by the MEMS switch, and for detecting movement and displacement change of the movable polar plate to test the self-absorption power of the MEMS switch. The test system and method for the self-absorption power of the MEMS switch have the advantage that that by inputting the radio frequencysignal into the MEMS switch to drive the movable polar plate of the MEMS switch to move, by detecting whether or not the movable polar plate moves through the detecting module, and by detecting the displacement change after the movable polar plate moving to detect the self-absorption power of the MEMS switch, the method of testing the self-absorption power can make the test system more standardized and practical.

Description

technical field [0001] The invention relates to the field of radio frequency (RF) and microelectromechanical system (MEMS) technology, in particular to a self-absorbing power testing system and method of a MEMS switch. Background technique [0002] RF MEMS switch refers to a micro-mechanical switch that works in the radio frequency range. It uses the movement of the micro-mechanical structure to control the on and off of radio frequency signal transmission. It is an important basic component of RF MEMS technology, and it is also the The basic components of the device and resonator. RF MEMS technology is widely used, and can be applied to various communication systems including mobile communication and satellite communication, and can also be applied to radar systems and industrial control and test systems. [0003] The performance parameters of RF MEMS switches include driving voltage, switching time, operating frequency, bandwidth, insertion loss, isolation, carrying power...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L3/24
CPCG01L3/24
Inventor 赵嘉昊谷明玥
Owner 江苏智能微系统工业技术股份有限公司
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