Curvature sensor based on multi-double-clamped-beam structure

Abstract

The invention provides a curvature sensor based on a multi-double-clamped-beam structure. The curvature sensor comprises a flexible substrate, trapezoid metal, a metal contact block, and double-clamped-beam anchor regions. The trapezoid metal is placed on the two sides of the metal contact block, the double-clamped-beam anchor regions are placed on the trapezoidal metal, a plurality of parallel and overhead double-clamped-beams are arranged above the metal contact block between the double-clamped-beam anchor regions, the plurality of double-clamped-beams are in the same suspended height and indifferent height, when the flexible substrate is attached to the surface of one curvature, the bent flexible substrate can cause the double-clamped-beams to be in contact with the metal contact block, and the length of the double-clamped-beams is shorter, the larger the curvature of the contact between the double-clamped-beams and the metal contact block is, the measurement of the curvature is realized by detecting the number of the contact parts of the parallelly arranged double-clamped-beams in different lengths and the metal contact block, the structure is simple and reliable, the designis flexible, the digital output is realized, and the error range is controlled.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and in particular relates to a curvature sensor based on a plurality of double-end fixed beam structures. Background technique [0002] In the current devices for measuring curvature, the radius of curvature of a convex-concave surface of any shape is generally measured by an R-shaped surface template. Since the R-shaped surface template is a comparative measurement, it is impossible to measure the precise value of the geometric shape. Although the three-coordinate measuring instrument can solve the above problems well, the cost is too high and the volume is too large to be measured online. Similar problems also exist in non-contact optical measurement methods. Contents of the invention [0003] In view of the above problems, the present invention provides a multi-double-end fixed-supported beam structure curvature sensor that is similar to digital output, improves curvature me...

AI Technical Summary

Problems solved by technology

[0002] In the current devices for measuring curvature, the radius of curvature of convex and concave surfaces of any shape is generally measured by R-shaped surface templates. Since the R-shaped surface template is a comparative measurement, it is impossible to measure the precise value of the geometric shape.

Although the three-coordinate measuring instrument can solve the above problems well, the cost is too high and the volume is too large to be measured online.

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