Air bearing module

Abstract

The invention disclsoes an air bearing module including a guide rail, a sliding block, a first air floating plate and a second air floating plate. The guide rail has a first surface and a second surface. The sliding block has a groove, a first inner wall and a second inner wall, the guide rail passes through the groove so that the sliding block can slide relative to the guide rail. The first air floating plate is located between the first surface and the first inner wall surface, wherein a first air cavity is formed between the first air floating plate and the first inner wall surface and a first air floating gap is formed between the first air floating plate and the first surface. The second air floating plate is located between the second surface and the second inner wall surface, wherein a second air cavity is formed between the second air floating plate and the second inner wall surface and a second air floating gap is formed between the second air floating plate and the second surface. The air bearing module allows dimensional micromation or high-precise dynamic adjustment.

Description

technical field [0001] The invention relates to an air bearing module, and in particular to an air bearing module that can be miniaturized, can be dynamically adjusted with high precision and has high rigidity. Background technique [0002] With the development of industrial technology, non-contact bearing modules have been practically applied in many fields. The non-contact bearing module takes the air bearing module as an example, which fills air between the guide rail and the slider, and forms an air film (air layer) between the guide rail and the slider. In this way, the guide rail and the slider will not be in direct contact during the sliding process, avoiding friction between the guide rail and the slider during sliding, and reducing the probability of component loss. [0003] At present, if the traditional air bearing module uses screws to adjust the air bearing gap between the guide rail and the slider, the size of the screw is limited, and the air bearing module i...

AI Technical Summary

Problems solved by technology

[0003] At present, if the traditional air bearing module uses screws to adjust the air bearing gap between the guide rail and the slider, the size of the screw is limited, and the air bearing module is difficult to miniaturize, or cannot perform high-precision dynamic adjustment.

In addition, if the slider or guide rail has dimensional tolerances in different areas, the air bearing gap between the slider and the guide rail in different areas will fluctuate, making the air bearing gap between the guide rail and the slider The air film cannot maintain high rigidity

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