Trench-type vertical double-diffused metal oxide transistor and manufacturing method thereof
A technology of oxide transistors and vertical double diffusion, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of complex process and high cost, and achieve the effects of simplified process flow, low cost and low operating efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] see Figure 1-Figure 10 , figure 1 It is a flow chart of the fabrication method of the trench-type vertical double-diffused metal oxide transistor of the present invention, Figure 2-Figure 10 for figure 1 Schematic diagram of the structure of each step of the manufacturing method of the trench type vertical double-diffused metal oxide transistor shown. The manufacturing method of the trench-type vertical double-diffused metal oxide transistor includes the following steps.
[0031] Step S1, see figure 2 ...
PUM
Property | Measurement | Unit |
---|---|---|
temperature | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com