A cryogenic pump with variable pumping speed

Abstract

The invention discloses a suction speed variable low-temperature pump. The suction speed variable low-temperature pump comprises a case with the opening roughly in a cylindrical shape, a radiation cold shield and a refrigerator cold head, wherein the radiation cold shield and the refrigerator cold head are arranged inside the case and are in thermal connection. The suction speed variable low-temperature pump is characterized by also comprising a low-temperature baffle, a linkage bar, an eccentric shaft, a fixing support, a thermal conducting bar, an elastic cold chain and a sucker electromagnet module. Through the eccentric shaft, the output shaft of a driving motor drives the linkage bar to move axially along the suction speed variable low-temperature pump; the linkage bar drives the thermal conducting bar to move axially along the suction speed variable low-temperature pump; the thermal conducting bar drives the low-temperature baffle to adjust the temperature through a gear self-locking mechanism; the radiation cold shield transfer cooling capacity to the low-temperature baffle via the elastic cold chain, the thermal conducting bar and the gear self-locking mechanism. The suction speed variable low-temperature pump has the advantages of being simple in structure and high in automation and can achieve flexible control of suction speed.

Description

technical field [0001] The invention belongs to the field of cryogenic vacuum technology, and in particular relates to a cryogenic pump. Background technique [0002] A cryopump is a vacuum pump that condenses gas on a low-temperature surface, also known as a condensation pump. Cryopumps can obtain a clean vacuum with the highest pumping rate and the lowest ultimate pressure, and are widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters and space simulation devices, etc. aspect. [0003] The analysis and test results show that the main factors that determine the condensation and adsorption effects of the cryopanel in the cryopump are: the opening area of ​​the gas inlet relative to the cryopanel, the distance and angular position between the gas inlet and the cryopanel, etc. As an important part of the cryopump, the cryogenic baf...

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