Gas concentration detection device and gas concentration detection method

Abstract

The invention relates to a gas concentration detection device and a gas concentration detection method. The gas concentration detection device comprises a vacuum detection cavity, a gas concentrationdetection sensor, a vacuum sampling element and a detection analyzer, wherein the sampling element is connected with the detection cavity; the detection cavity is connected with an outer sealed cavityused for accommodating to-be-detected gas; the gas concentration detection sensor is arranged in the detection cavity; the detection analyzer is connected with the gas concentration detection sensorand the sampling element. According to the gas concentration detection device, the concentration of the gas is detected by the gas concentration detection sensor and the vacuum detection cavity, so that an accurate detection result can be obtained; gas in the sealed cavity is sampled by the sampling element, and a greater accurate detection result is obtained the analysis of the detection analyzer; in addition, whether the sensor goes wrong or not is judged by comparing the two concentration detection results by the detection analyzer, so that wrong concentration information due to the failureof the sensor is avoided. Therefore, the detection results are more accurate.

Description

technical field [0001] The present application relates to the detection field, in particular to a gas concentration detection device and a gas concentration detection method. Background technique [0002] With the development of electronic technology, the requirements for the packaging process of electronic devices are becoming more and more stringent. When there is a "hydrogen effect" in the packaging process, it will change the performance of the device, cause the device to work abnormally, and cause the device to fail. shorten the service life of the device. In order to solve the problem of the hydrogen effect of the device, it is necessary to quickly evaluate the ability of the device to resist "hydrogen poisoning". This requires accelerating the hydrogen effect of the device in high-temperature, high-pressure hydrogen gas, so we need to accurately control the hydrogen concentration in the high-temperature, high-pressure chamber, and need to detect the hydrogen concentr...

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Problems solved by technology

[0004] Based on this, it is necessary to provide an accurate gas concentration detection device and a gas concentration detection method for the problem that it is difficult to judge whether the gas concentration itself has changed or the gas concentration detection sensor has failed, and the accurate gas concentration detection result cannot be obtained.

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