Self-powered flexible gas sensor

Abstract

The invention provides a self-powered flexible gas sensor. The self-powered flexible gas sensor comprises a flexible substrate, a gas sensing array and a flexible nanogenerator, wherein a groove is formed in the flexible substrate; an array gas sensor is arranged at the bottom of the groove; a cavity is formed in one side of the groove; the peripheral wall of the cavity is coated with a frictionalpower generating layer; the cavity is filled with liquid metal; a long strip-shaped metal electrode, and a conductive wire connected with the long strip-shaped metal electrode and the liquid metal are arranged at the bottom of the groove and between the groove and the cavity. The self-powered flexible gas sensor solves the problem that at present, the gas sensor cannot be applied in a flexible state; through structural improvement and arrangement of the cavity and the flexible nanogenerator, real-time interaction between gas to be detected and the outside world is achieved, a basis is provided for endowing a wearable device with a gas sensing function, and the nanogenerator further achieves self-powder to a certain degree.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a self-powered flexible gas sensor. Background technique [0002] At present, the more common sensors are based on non-deformable silicon substrates. Although the processing technology is mature, in the chemical industry scene, gas leakage usually comes from connecting parts such as pipeline flanges and valves. Non-deformable silicon substrates The flexibility of sensor placement is also reduced. Sensors based on flexible materials can solve this problem, and facilitate the placement of sensors on various irregular surfaces and small gaps of factory equipment (such as bending arrangements near valve flanges, etc.), improving the accuracy of detection. [0003] During the past fifty years, various technical branches of gas sensing technology have been established through different studies. At present, the most common gas sensing technology is the sensing technology based on ...

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Problems solved by technology

[0005] In order to solve the problem that the current gas sensor cannot be applied in a flexible state, the real-time interaction between the gas to be detected and the outside world is realized by improving the structure and setting up a cavity and a flexible nano-generator, which provides a gas sensing function for wearable devices. At the same time, the nanogenerator also realizes self-supply to a certain extent. The present invention provides a self-supplied flexible gas sensor, which includes a flexible substrate, a gas sensor array and a flexible nanogenerator. In the flexible substrate A groove is formed, an array gas sensor is arranged on the bottom of the groove, the array gas sensor includes a plurality of sensing sites arranged in an array, a cavity is arranged on one side of the groove, and the surrounding walls of the cavity Coated with a triboelectric layer, the cavity is filled with liquid metal, a strip-shaped metal electrode is arranged between the groove and the cavity at the bottom of the groove, and the conductive wire connected to the strip-shaped metal electrode and the liquid metal , the strip-shaped metal electrode is used as the common electrode of the gas sensing site, and at the same time as the output electrode of the nanogenerator formed by the triboelectric layer, liquid metal and conductive wire

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