Large-aperture wide-spectrum F-P tunable filter high-precision assembling system

A technology for tuning filters and assembly systems, which is applied in the use of multiple reflections to generate spectra, optics, instruments, etc., can solve the problem of piezoelectric actuators losing effective adjustment capabilities, and achieve strong parallelism adjustment capabilities and high displacement positioning accuracy Effect

Active Publication Date: 2018-08-10
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

In order to make the device as light and thin as possible, the thickness of the piezoelectric ceramic block selected by TFPF is generally 2-3mm, and its maximum output displacement is only a few μm. The maximum output displacement of the piezoelectric actuator, the piezoelectric actuator will lose the ability to effectively adjust the length of the cavity and the parallelism between the mirrors

Method used

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  • Large-aperture wide-spectrum F-P tunable filter high-precision assembling system

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Embodiment Construction

[0030] The present invention will be further described below by taking a high-precision assembly system with 30mm effective aperture and wide spectral range TFPF as an example.

[0031] In this assembly system, the models of the mirror frame in the fixed mirror installation module 1, the mirror frame in the moving mirror installation module 2, the three-dimensional micro-displacement platform 3 and the piezoelectric inertia driver 6 are KS2RS, KS2, PIAK10 and MBT616D / M respectively. The machine components, the rods and bases that match the frame are all produced by Thorlabs; the two-dimensional electric translation stage 7 is assembled by the ultra-thin electric translation stage TSA30-C and the high-precision electric lifting table KSAV2030-ZF produced by Zhuoli Hanguang made.

[0032] When assembling the TFPF, first install the fixed mirror and the moving mirror into the optical adjustment frame KS2RS and KS2 of the fixed mirror installation module 1 and the moving mirror in...

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Abstract

The invention discloses a large-aperture wide-spectrum F-P tunable filter high-precision assembling system. The assembling system is mainly composed of a fixed mirror installing module, a moving mirror installing module, a piezoelectric inertial driver, a three-dimensional micro displacement platform and a two-dimensional electric displacement platform. The initial cavity length of the F-P cavityand the parallelism between the reflecting mirror surfaces are accurately set by using adjustment of three adjusting mechanisms of rough adjustment, micro adjustment and fine adjustment, the cavity length adjustment resolution can be the order of 10nm and the parallelism between the two reflecting mirror surfaces in the cavity can be the order of 10-1murad. The high-precision assembling system ishigh in displacement positioning accuracy and high in parallelism adjustment capacity so that the initial cavity length and the parallelism between the reflecting mirror surfaces of the F-P cavity ofthe large-aperture wide-spectrum range F-P tunable filter are enabled to meet the hyperspectral remote sensing application requirement.

Description

technical field [0001] The invention relates to an F-P tunable filter, in particular to a high-precision assembly system for a large-aperture wide-spectral range F-P tunable filter. Background technique [0002] Hyperspectral remote sensing technology has excellent performance in many application fields such as earth science, national defense security, environmental monitoring and deep space exploration with the characteristics of "map-spectrum integration" and powerful information acquisition capabilities. In recent years, the application of hyperspectral remote sensing technology in some special technical fields such as unmanned aerial vehicle systems and small satellite payloads has put forward higher requirements for the miniaturization and weight reduction of imaging spectrometers. [0003] Spectroscopic technology is one of the core key technologies in hyperspectral remote sensing technology. Existing hyperspectral imagers are mostly based on prism-grating-prism compon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/62G01J3/26
CPCG02B27/62G01J3/26Y02E40/40
Inventor 丛蕊刘定权蔡清元陈刚周晟蒋林
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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