Large-aperture wide-spectrum F-P tunable filter high-precision assembling system
A technology for tuning filters and assembly systems, which is applied in the use of multiple reflections to generate spectra, optics, instruments, etc., can solve the problem of piezoelectric actuators losing effective adjustment capabilities, and achieve strong parallelism adjustment capabilities and high displacement positioning accuracy Effect
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[0030] The present invention will be further described below by taking a high-precision assembly system with 30mm effective aperture and wide spectral range TFPF as an example.
[0031] In this assembly system, the models of the mirror frame in the fixed mirror installation module 1, the mirror frame in the moving mirror installation module 2, the three-dimensional micro-displacement platform 3 and the piezoelectric inertia driver 6 are KS2RS, KS2, PIAK10 and MBT616D / M respectively. The machine components, the rods and bases that match the frame are all produced by Thorlabs; the two-dimensional electric translation stage 7 is assembled by the ultra-thin electric translation stage TSA30-C and the high-precision electric lifting table KSAV2030-ZF produced by Zhuoli Hanguang made.
[0032] When assembling the TFPF, first install the fixed mirror and the moving mirror into the optical adjustment frame KS2RS and KS2 of the fixed mirror installation module 1 and the moving mirror in...
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