Vacuum pumping system with glass cover

A technology of vacuum system and glass bell jar, which is applied in the field of vacuum system, can solve the problems of poor observation, achieve the effect of low cost, reduce the number of interface requirements, and reduce the volume requirement

Inactive Publication Date: 2018-08-24
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a vacuum container with the convenience of direct observation and external measurement based on optics, which has a vacuum space formed by a glass bell jar, aiming at the defect of poor observability of the existing vacuum container with stainless steel structure

Method used

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  • Vacuum pumping system with glass cover

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Experimental program
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Embodiment

[0032] The vacuum pumping system consists of an air-cooled molecular pump, a vortex dry pump, a manual flapper valve, a solenoid valve, a hot cathode ionization gauge, a resistance gauge and a pumping pipeline. The pumping speed of the molecular pump is 300L / s, the pumping speed of the scroll dry pump is 3L / s, the diameter of the manual slide valve is DN100mm, and the diameter of the solenoid valve is DN25mm. The no-load limit pressure of the vacuum pumping system can reach 10 -5 Pa.

[0033] The connecting flange is made of stainless steel, and the size is: Φ445mm×20mm. The upper surface of the flange is used to seal with the glass bell jar and install the test piece, and the sealing groove and threaded hole are processed on the upper surface. The lower surface of the flange is provided with a CF100mm vacuum pumping interface, a CF35mm ionization gauge interface, and a KF16mm resistance gauge interface.

[0034] O-ring, made of fluorine rubber, size: Φ400mm×8mm, installed ...

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Abstract

The invention discloses a vacuum pumping system with a glass cover. The vacuum pumping system with the glass cover comprises the vacuum pumping system, a connecting flange, an O-shaped sealing ring, aglass cover and a counterweight lifting mechanism. The connecting flange is connected with the vacuum pumping system through the O-shaped sealing ring to vacuumize the glass cover. According to the vacuum pumping system with the glass cover, the glass cover can be directly observed, optical observation and measurement can be conveniently carried out on the outer portion of vacuum space, the volume requirement and connecting opening requirement of the vacuum pumping system are greatly reduced, and the observability and reliability of a vacuum container are greatly improved.

Description

technical field [0001] The invention belongs to the field of vacuum technology, in particular to a vacuum system with a glass bell jar. Background technique [0002] A large number of vacuum containers are used in many fields such as military industry, aerospace, private enterprises, laboratories, etc., such as materials, environment simulation, and environment provision, such as material sputtering instruments, military gyro operation containers, visualization instruments and equipment, vacuum welding operation equipment, etc. . Vacuum systems are widely used in the preparation of micro-nano and magnetic materials, electronic semiconductor industry, photoelectric backlight module, mechanical processing and other industries. The vacuum container is a key component of the vacuum system. It is a key component that forms and maintains the vacuum environment and constitutes the space for the implementation of experiments, preparations, and processing operations. The vacuum cont...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65D81/20B65D1/00
CPCB65D1/00B65D81/2015B65D81/2038
Inventor 徐飞夏彦何世熠李强杨艳斌孙继鹏张显欧学东田东波
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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