Substrate cleaning system and cleaning method

Abstract

The invention relates to the field of a display panel, in particular to a substrate cleaning system and a substrate cleaning method. The substrate cleaning system comprises at least two side sprayingunits, a middle spraying unit and a control unit, wherein the at least two side spraying units are arranged at the peripheral positions of the substrate and are used for spraying a cleaning agent to clean the periphery of the substrate; the middle spraying unit is arranged at the middle position of the substrate, is positioned between the at least two side spraying units and is used for spraying the cleaning agent to clean the middle part of the substrate; the control unit is connected with the at least two side spraying units and the middle spraying unit separately and is used for adjusting the spraying quantity of the cleaning agent of the at least two side spraying units and / or the middle spraying unit, so that deviation of the dosage of the cleaning agent at different parts of the substrate is avoided. When the substrate is cleaned, the dosage of the cleaning agent retained at each part of the substrate can be uniform, so that the quality of the substrate is improved and the whitespot phenomenon is effectively improved.

Description

technical field [0001] The invention relates to the field of display panels, in particular to a substrate cleaning system and a cleaning method. Background technique [0002] At present, 5.48FHD substrate products have a high incidence of blocky white spots. After research by the inventor, it is found that the high incidence of white spots on substrate products is caused by 1300&1600 stations (Docking clean). Please also refer to figure 1 and figure 2 , figure 1 It is a schematic structural diagram of a substrate cleaning system provided by traditional technology. figure 2 is based on figure 1 Test chart of substrates cleaned by the substrate cleaning system shown. Such as figure 1 and figure 2 As shown, the substrate cleaning system 100 includes several spraying devices 12 sharing the same pipeline 11 , and the spraying devices 12 spray a cleaning agent to clean the substrate 13 . During the spraying process, an equal amount of cleaning agent is sprayed from abov...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the above technical problems, the purpose of the embodiment of the present invention is to provide a substrate cleaning system and cleaning method, which aims to solve the technical problem of uneven display brightness and white spots caused by the difference in the retention of cleaning agent on the substrate in the traditional technology.

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