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A Coplanar Variable Slit Device with Multiple Apertures

A multi-aperture coplanar and slit technology is applied in the direction of optics, optical components, instruments, etc. It can solve the problems that cannot be satisfied at the same time, and the blade structure is not proposed, so as to eliminate the influence of exposure uniformity and meet the requirements of two-dimensional movement and Effect of Independent Single-Side Scanning Requirements

Active Publication Date: 2019-05-07
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But did not propose the embodiment that can realize blade coplanarity and related blade structure
[0009] The above-mentioned inventions have in common that they cannot simultaneously satisfy the two problems of scanning in any range in the plane and coplanarity of the knife-edge in the two-dimensional direction; however, the stepper projection exposure device, as a key component in a cutting-edge photolithography machine, has become a constraint Key Technical Difficulties in Practical Application of Lithography Machine Exposure System

Method used

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  • A Coplanar Variable Slit Device with Multiple Apertures
  • A Coplanar Variable Slit Device with Multiple Apertures
  • A Coplanar Variable Slit Device with Multiple Apertures

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Embodiment Construction

[0028] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] refer to figure 1 , a variable slit device with multiple apertures coplanar, mainly including a slit window 1, a drive control unit 2, and a back plate 3; four drive control units 2 are installed on the back plate 3, and the slit window 1 Installed at the displacement output ends of four drive control units 2;

[0030] refer to figure 2 with 3 , the slit-type window 1 includes four diaphragms 4, and the diaphragms 4 are connected in pairs through four follow-up connection units 5. The diaphragm 4 is processed with a positioning knife edge 16, and the back of the positioning knife edge 16 is processed with a belt Positioning slit 15 with inclination angle; slit knife edge 13 with inclination angle is processed on the diaphragm plate 4, and the end of slit knife edge 13 is processed with limiting chute 12, and a knife transport groove 14 is pr...

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Abstract

The invention discloses a multi-diaphragm coplanar variable slit device; the device forms a rectangular slit-type window through four diaphragms connected end to end, and the positioning knife edge is installed parallel to the adjacent diaphragms. In the knife transport slot, the slit knife edge is installed in parallel in the positioning slot of the adjacent diaphragm plate, realizing the coplanarity of the four sides of the scanning window, thereby eliminating the influence of edge diffraction on the exposure uniformity. The present invention can be used to build a high resolution, high motion / positioning precision projection exposure device.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and machinery, in particular to a variable slit device with multiple apertures coplanar. Background technique [0002] In recent years, as the advanced chip manufacturing industry gradually develops towards functional integration and volume miniaturization, after lithography technology has experienced several development stages of contact, proximity, and scanning projection, step-scan projection has become the current mainstream technology. [0003] As the light blocking device in the step-and-scan exposure system, the scanning slit is used to limit the size and center position of the illumination field of view of the mask surface, and to avoid the imaging beam from affecting the area outside the exposure field through the synchronous scanning movement of the blade during the exposure process. exposure. The main problem of the traditional scanning slit is that it cannot satisfy the...

Claims

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Application Information

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IPC IPC(8): G02B26/00G02B26/10
CPCG02B26/00G02B26/10
Inventor 吴剑威温众普张银彬德尔崔继文谭久彬
Owner HARBIN INST OF TECH