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ICP-MS (inductively coupled plasma mass spectrometry) micro-flow atomizer cleaning solution as well as dredging device and dredging method using same

A technology of ICP-MS and cleaning solution, which is applied in the direction of chemical instruments and methods, cleaning methods and utensils, cleaning hollow objects, etc., can solve the problems of rising test and analysis costs, complex sample types, and difficulty in dredging, so as to reduce production costs, Remarkable effect, the effect of improving production capacity

Inactive Publication Date: 2018-11-16
SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The types of samples in this ICP-MS machine are complex, and most of them are silicon-containing substrates, which are easy to clog
The sample injection tube at the sample input end of the nebulizer is about 1 meter, and the inner diameter of the sample tube is very thin. If a blockage occurs due to difficulty in unblocking, it is generally replaced with a new nebulizer directly, resulting in an increase in the cost of testing and analysis

Method used

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  • ICP-MS (inductively coupled plasma mass spectrometry) micro-flow atomizer cleaning solution as well as dredging device and dredging method using same
  • ICP-MS (inductively coupled plasma mass spectrometry) micro-flow atomizer cleaning solution as well as dredging device and dredging method using same
  • ICP-MS (inductively coupled plasma mass spectrometry) micro-flow atomizer cleaning solution as well as dredging device and dredging method using same

Examples

Experimental program
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Effect test

no. 1 example

[0040] The first embodiment of the ICP-MS micro-flow nebulizer cleaning solution provided by the present invention comprises: hydrofluoric acid (HF), nitric acid (HNO3), hydrogen peroxide (H 2 o 2 ) and pure water (DIW);

[0041] Hydrofluoric acid (HF), nitric acid (HNO3), hydrogen peroxide (H 2 o 2 ) and pure water (DIW) volume ratio is (0.5-2): (0.5-2): (0.5-2): (13-1). Wherein the concentration of hydrofluoric acid (HF) is 49%, and the concentration of nitric acid (HNO3) is 70%.

no. 2 example

[0042] The second embodiment of the ICP-MS micro-flow nebulizer cleaning solution provided by the present invention comprises: hydrofluoric acid (HF), nitric acid (HNO3), hydrogen peroxide (H 2 o 2 ) and pure water (DIW);

[0043] Hydrofluoric acid (HF), nitric acid (HNO3), hydrogen peroxide (H 2 o 2) and pure water (DIW) in a volume ratio of 1:1:1:5; wherein the concentration of hydrofluoric acid (HF) is 49%, and the concentration of nitric acid (HNO3) is 70%.

[0044] Such as figure 2 As shown, the present invention provides an ICP-MS micro-flow nebulizer dredging device for the above-mentioned ICP-MS micro-flow nebulizer cleaning liquid, including: a cleaning liquid storage part, a cleaning liquid delivery part and a cleaning drive part;

[0045] The cleaning liquid storage part is airtightly connected to the connection end of the micro-flow atomizer and the spray chamber, the airflow input end of the micro-flow atomizer is closed, and the sample input end of the micro...

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Abstract

The invention discloses an ICP-MS (inductively coupled plasma mass spectrometry) micro-flow atomizer cleaning solution. The cleaning solution contains HF (hydrofluoric acid), HNO3 (nitric acid), H2O2(hydrogen peroxide) and DIW (deionized water) in a volume ratio of 1:1:1:5. The invention further discloses an ICP-MS micro-flow atomizer dredging device using the ICP-MS micro-flow atomizer cleaningsolution and an ICP-MS micro-flow atomizer dredging method using the ICP-MS micro-flow atomizer cleaning solution. The cleaning solution has remarkable cleaning and dredging effects on silicon-containing substrates, high-salt bases, high-concentration acids and alkalis and the like. According to the ICP-MS micro-flow atomizer dredging device and method, the cleaning solution is reversely input ina micro-flow atomizer in the direction opposite to working flow direction of the micro-flow atomizer, blockage in the micro-flow atomizer is flushed repeatedly by drive of a peristaltic pump, and theblocked micro-flow atomizer can be effectively dredged. With the adoption of the technical scheme, the service life of the micro-flow atomizer can be prolonged, so that the production cost is reducedand the yield is increased.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a cleaning liquid for an ICP-MS microflow nebulizer. The present invention also relates to an ICP-MS micro-flow nebulizer dredging device using the ICP-MS micro-flow nebulizer cleaning liquid and an ICP-MS micro-flow nebulizer cleaning liquid using the ICP-MS micro-flow nebulizer Microfluidic nebulizer unblocking method. Background technique [0002] ICP-MS, the full name of Inductively coupled plasma mass spectrometry, refers to the meaning of inductively coupled plasma mass spectrometry. It is composed of ICP torch, interface device and mass spectrometer. The ionization source used in ICP-MS is inductively coupled plasma (ICP), which is the same as the ICP used in atomic emission spectrometers. Its main body is a torch tube composed of three layers of quartz sleeves, and the upper end of the torch tube is wound with a load coil. The three-layer tube passes through the carrier g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D7/60C11D7/08C11D7/38C11D11/00B08B9/032
CPCC11D3/392C11D7/08B08B9/032C11D2111/20
Inventor 俞佳宋健姜舜
Owner SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD