Large ITO target storage box

Abstract

The invention discloses a large ITO target storage box. The storage box comprises a main box body, a storage cavity body and a moving cabinet. The bottom end of the main box body is fixedly provided with fixed legs, and the surface of the main box body is provided with a sealing door body through hinges. The surface of the sealing door body is provided with a crank handle through a pin roll, and asnap ring is welded on the surface of the main box body on one side of the sealing door body. The main box body is provided with the storage cavity body, a limit door panel is installed on the surface edge of the inner wall of the storage cavity body by hinges, the moving cabinet is movably installed in the storage cavity body, and the surface of the moving cabinet is provided with a groove. Storage separation cavities are uniformly arranged in the moving cabinet, and a transfer rack is movably arranged in each storage separation cavity. By means of the structures, the target storage box canstore large targets and facilitates taking and storage of the targets at the same time. The inside of the storage box can be subjected to shock absorption treatment to fully protect the targets.

Description

technical field [0001] The invention relates to the technical field of target material storage, in particular to a large-scale ITO target material storage box. Background technique [0002] In the classification of coated targets, ITO targets are classified as ceramic targets, which have poor mechanical properties. When subjected to external forces, they are extremely prone to adverse phenomena such as crushing or cracking, especially for large ITO targets. In the storage process of ITO target materials, in order to avoid damage to the target materials by external forces, it is necessary to ensure that the storage box or target material box has sufficient shock absorption effect, and the existing storage device structure is relatively simple, which cannot be stored internally The target is well limited, the shock absorption effect can be achieved is relatively limited, and the protection of the target is insufficient. When taking it, it is to apply force to a certain positio...

AI Technical Summary

Problems solved by technology

[0002] In the classification of coated targets, ITO targets are classified as ceramic targets, which have poor mechanical properties. When subjected to external forces, they are extremely prone to adverse phenomena such as crushing or cracking, especially for large ITO targets. In the storage process of ITO target materials, in order to avoid damage to the target materials by external forces, it is necessary to ensure that the storage box or target material box has sufficient shock absorption effect, and the existing storage device has a relatively simple structure and cannot be stored internally The target is well limited, the shock absorption effect can be achieved is relatively limited, and the protection of the target is insufficient. When taking it, it is to apply force to a certain position of the target, and the target is too long or large. At the same time, the force concentration is obvious, and there is a risk of deformation or even fracture. There are also some storage boxes on the market that fully limit the target and even have good shock absorption effects. However, the internal structure of this type of storage box is complex, and it is difficult to pick up or use it. When storing the target, the process is more complicated and not convenient for actual operation

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