Leakage current sensing chip based on MEMS technology
A process and chip technology, applied in the field of leakage current sensor chips, can solve the problem of not getting rid of the overall concept of the leakage current sensor, and achieve the effect of reducing the size and occupying space
Active Publication Date: 2018-11-30
ZHEJIANG JUZI INTELLIGENT TECH
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Problems solved by technology
Although the above-mentioned technical scheme points out the cross-sectional area of the measured wire (2), the distance between two ends and other data, it still does not get rid of the general idea of three-dimensionally setting the leakage current sensor
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[0019] The present invention discloses a leakage current sensing chip based on MEMS technology. The specific implementation manner of the present invention will be further described below in combination with preferred embodiments.
[0020] see attached Figure 1 to Figure 2 , figure 1 A preferred embodiment of the leakage current sensing chip based on the MEMS process is shown, figure 2 The structure of the leakage current sensing chip based on the MEMS process is shown in the main viewing direction.
[0021] Preferably, according to the preferred embodiment, see the accompanying drawings figure 1 with figure 2 , the leakage current sensor chip based on MEMS process includes:
[0022] an annular magnetic core 10 and an annular coil 20 wound on the annular magnetic core 10;
[0023] The inside of the annular magnetic core 10 runs through a first wire 11 (only for illustration in the figure) and a second wire 12 (for illustration only in the figure), and the current direc...
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The invention discloses a leakage current sensing chip based on MEMS technology. The leakage current sensing chip comprises induction coils, an annular magnetic core and annular coils, wherein the annular coils wind the annular magnetic core. A first guide wire and a second guide wire are arranged in the annular magnetic core in a penetrating mode, and current directions of the first guide wire and the second guide wire are opposite. The induction coils are close to the annular magnetic core and located on one side of the annular magnetic core, iron cores are close to the annular magnetic coreand located on the other side of the annular magnetic core, so that induction data generated by induction of the interiors of the induction coils meet needs for being further processed. According tothe leakage current sensing chip based on the MEMS technology, a leakage current sensor is upgraded to the leakage current sensing chip, and sizes and occupied space are obviously shortened. And meanwhile, the leakage current sensing chip is oriented towards a goal of planar design, adapts to chip forms, and is upgraded to a planar structure from a traditional spatial structure.
Description
technical field [0001] The invention belongs to the technical field of leakage current detection, and in particular relates to a leakage current sensing chip based on MEMS technology. Background technique [0002] At present, sensors with different current levels are widely used. In the field of leakage current detection technology, traditional leakage current sensors usually adopt a three-dimensional configuration, which has defects such as large space occupation and high overall height. For example, the application number is 201420575861.8, and the subject name is a utility model patent for a modular leakage current sensor. figure 1 As can be seen from Figure 5, the technical solution disclosed in this utility model patent: the leakage current sensor (1) is fixedly installed in the middle of the fixed plate (3), and the measured wire (2) passes through the measurement hole of the current sensor. Although the above-mentioned technical solution points out data such as the ...
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IPC IPC(8): G01R19/00G01R31/02
CPCG01R19/00G01R31/50
Inventor 陈全
Owner ZHEJIANG JUZI INTELLIGENT TECH