A method of using a process device for preparing electronic grade hydrogen fluoride

A process device, hydrogen fluoride technology, applied in the direction of hydrogen fluoride, fluorine/hydrogen fluoride, chemical instruments and methods, etc., can solve problems such as safety accidents, fluorine gas is highly toxic, and increase the difficulty and cost of processing

CN109052326BActive Publication Date: 2020-01-10永春县产品质量检验所福建省香产品质量检验中心国家燃香类产品质量监督检验中心福建
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2020-01-10

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Abstract

The invention relates to the technical field of fluorine chemical engineering, in particular to an application method for preparing an electronic grade hydrogen fluoride process device. The method ischaracterized in that high-boiling residues HAsF6 and MAsF6 are produced through arsenic impurity in fluorine oxidized hydrogen fluoride, and the pure electronic grade hydrogen fluoride is separated from a multi-component composition through volatility difference of the high-boiling residues HAsF6 and MAsF6, HF and other components and multiple equilibrium processes. A rectification technical process adopts reflux liquid and upward gas to form gas and liquid countercurrent contact in a distillation tower, volatile component products with high purity can be obtained from the top of the tower, and non-volatile component products with high purity can be obtained from the bottom of the tower. The main component of tail gas produced from hydrogen fluoride rectification mainly comprises HF steam, the tail gas further comprises the following volatile components: SO2, SiF4, PF3, POF3, AsF5, SF6 and PF5, and the tail gas can be completely washed with pure water, condensed and recycled to prepare technical grade hydrofluoric acid.
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Description

Technical field

[0001] The invention relates to the technical field of fluorine chemicals, in particular to a method of using a process device for preparing electronic grade hydrogen fluoride. Background technique

[0002] Electronic grade hydrogen fluoride is mainly used as a cleaning agent and etchant in photovoltaics, integrated circuits and other industries. It is one of the key auxiliary materials for these industries. Because the impurity arsenic has a serious impact on the performance of electronic devices, the removal of arsenic is the purification of hydrogen fluoride The key technology, the usual method is to use an oxidant to oxidize trivalent arsenic into a high-boiling pentavalent arsenic compound, and then use the difference in volatility to distill it out. Chinese invention patent (patent number CN201110276860.4, patent name is a method for preparing electronic grade hydrofluoric acid) discloses a method for preparing electronic grade hydrofluoric acid, including t...

Examples

Embodiment Construction

[0033] The present invention will be further described below in conjunction with the drawings and specific embodiments.

[0034] Such as figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 As shown, a method for preparing electronic grade hydrogen fluoride process equipment is characterized by:

[0035] Step one, inject anhydrous hydrogen fluoride into the circulation storage tank 3 of the transpiration circulation reactor I, observe through the sight glass, and ensure that the liquid level is 3~5cm lower than the plane of the gas-liquid separator 2 in the oxidation reactor 1 1 Inlet fluorine gas, keep the air pressure in the oxidation reactor 1 in balance with the ambient air pressure, observe the liquid level condition of the U-shaped liquid seal assembly at the bottom of the circulating fluidized bed distillation column with a liquid level gauge. The liquid level is at least 300mm higher than the return pipe to ensure that the U-shaped liquid seal assembly is in normal work...